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公开(公告)号:EP0969118A3
公开(公告)日:2003-08-06
申请号:EP99305292.7
申请日:1999-07-02
发明人: Tonosaki, Minehiro , Takei, Yutaka , Okita, Hiroyuki , Horino, Yuji c/o Osaka National Research Inst. , Chayahara, Akiyoshi Osaka National Research Inst. , Kinomura, Atsushi Osaka National Research Inst. , Tsubouchi, Nobuteru Osaka National Research Inst.
CPC分类号: C23C14/48 , B29C59/16 , B29C2035/0872 , B29C2043/527 , B29C2043/566 , C23C14/02
摘要: There are disclosed a surface hardening method for resins and a surface hardened resin, capable of reforming the surface of a plastics disk substrate at low energy in a short time, and a production device of such a resin. The formation of an ion-implanted layer (11) by implanting equal to or more than 10 17 carbon ions per cm 2 into the surface of a plastic disk substrate (10) at equal to or less than 20 KeV and the formation of a thin film (12) of high hardness on the ion-implanted layer (11) are performed alternately or simultaneously, and the hardening rate is increased further by using a bias device.