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公开(公告)号:EP1868247B1
公开(公告)日:2013-04-24
申请号:EP06425396.6
申请日:2006-06-13
IPC分类号: H01L29/78 , H01L21/336 , H01L29/423 , H01L21/28 , H01L29/10
CPC分类号: H01L29/42376 , H01L21/28114 , H01L29/1045 , H01L29/42368 , H01L29/66484 , H01L29/66659 , H01L29/7831 , H01L29/7835
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公开(公告)号:EP1635399B1
公开(公告)日:2011-05-04
申请号:EP04425671.7
申请日:2004-09-08
IPC分类号: H01L29/78 , H01L21/336 , H01L29/41
CPC分类号: H01L29/7835 , H01L29/1045 , H01L29/1087 , H01L29/402 , H01L29/4175 , H01L29/66659
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