公开(公告)号：EP2801787A1

公开(公告)日：2014-11-12

申请号：EP12861132.4

申请日：2012-10-31

申请人： Sumco Corporation

发明人： SUDO, Toshiaki ,  SATO, Tadahiro ,  KITAHARA, Ken

IPC分类号： G01B11/24 ,  C03B20/00 ,  C30B15/10 ,  C30B29/06

CPC分类号： G01B11/24 ,  C03B19/095 ,  C30B15/10 ,  C30B15/20 ,  C30B15/26 ,  C30B29/06 ,  H01L22/12

摘要： A method for measuring a three-dimensional shape of an inner surface of a vitreous silica crucible which enables the measurement of the three-dimensional shape of the inner surface of the crucible without contaminating the inner surface of the crucible, is provided. According to the present invention, a method for measuring a three-dimensional shape of a vitreous silica crucible, including a fogging step to form a fog onto an inner surface of the vitreous silica crucible, a three-dimensional shape measuring step to measure a three-dimensional shape of the inner surface, by measuring a reflected light from the inner surface irradiated with light, is provided.

摘要翻译： 一种用于测量石英玻璃坩埚其使坩埚的内表面的三维形状的测量，而不会污染坩埚的内表面的内表面的三维形状的方法，提供了一种。 。根据本发明，用于测量石英玻璃坩埚的三维形状，包括一个雾化步骤的方法来形成雾走上到石英玻璃坩埚的内表面，一个三维形状测量步骤测量了三 内表面的形状维，通过测量从被光照射的内表面的反射光，提供了一种。

公开(公告)号：EP2796595B1

公开(公告)日：2019-02-06

申请号：EP12859405.8

申请日：2012-10-31

申请人： SUMCO CORPORATION

发明人： SUDO, Toshiaki ,  SATO, Tadahiro ,  KITAHARA, Ken ,  KITAHARA, Eriko ,  KODAMA, Makiko

IPC分类号： G01B11/06 ,  G01B11/245 ,  C30B15/10 ,  C30B29/06

公开(公告)号：EP3006606B1

公开(公告)日：2020-01-15

申请号：EP13886011.9

申请日：2013-05-31

申请人： Sumco Corporation

发明人： SUDO, Toshiaki ,  KITAHARA, Ken ,  AIBA, Akihiro ,  OUSYUYA, Kazushi ,  YOSHIDA, Fumie ,  HINOOKA, Makiko ,  KITAHARA, Eriko ,  SATO, Tadahiro

IPC分类号： C30B15/10 ,  C03B19/09 ,  C30B29/06 ,  C30B35/00

公开(公告)号：EP2801787B1

公开(公告)日：2019-04-24

申请号：EP12861132.4

申请日：2012-10-31

申请人： Sumco Corporation

发明人： SUDO, Toshiaki ,  SATO, Tadahiro ,  KITAHARA, Ken

IPC分类号： G01B11/24 ,  C03B20/00 ,  C30B15/10 ,  C30B29/06

公开(公告)号：EP3006606A1

公开(公告)日：2016-04-13

申请号：EP13886011.9

申请日：2013-05-31

申请人： Sumco Corporation

发明人： SUDO, Toshiaki ,  KITAHARA, Ken ,  AIBA, Akihiro ,  OUSYUYA, Kazushi ,  YOSHIDA, Fumie ,  HINOOKA, Makiko ,  KITAHARA, Eriko ,  SATO, Tadahiro

IPC分类号： C30B15/10

CPC分类号： C30B15/10 ,  C03B19/095 ,  C30B29/06 ,  C30B35/002 ,  Y02P40/57

摘要： The present invention provides a vitreous silica crucible which inhibits a deformation even when used under a high temperature condition for a long time, and a method for manufacturing the same. The vitreous silica crucible comprises: a substantially cylindrical straight body portion having an opening on the top end and extending in a vertical direction, a curved bottom portion, and a corner portion connecting the straight body portion with the bottom portion and a curvature of which is greater than that of the bottom portion, wherein, the vitreous silica crucible comprises a transparent layer on the inside and a bubble layer on the outside thereof, a compressive stress layer in which compressive stress remains in the inner surface side of the transparent layer, and a tensile stress layer in which tensile stress remains and is adjacent to the compressive stress layer at a gradual rate of change of stress.

摘要翻译： 本发明提供了即使长时间在高温条件下使用也抑制变形的石英玻璃坩埚及其制造方法。 玻璃状石英玻璃坩埚包括：基本上圆柱形的直体部分，其在顶端具有开口并在垂直方向上延伸，弯曲的底部部分和将直体部分与底部连接的拐角部分，其曲率是 大于底部的玻璃状坩埚，其中，石英玻璃坩埚在内侧包括透明层，外侧具有气泡层，在透明层的内表面侧保留压缩应力的压缩应力层，以及 拉伸应力层，其中拉应力保持并且以逐渐的应力变化率邻近压应力层。

公开(公告)号：EP2799597A1

公开(公告)日：2014-11-05

申请号：EP12861985.5

申请日：2012-10-31

申请人： SUMCO CORPORATION

发明人： SUDO, Toshiaki ,  SATO, Tadahiro ,  KITAHARA, Ken ,  YOSHIOKA, Takuma ,  KISHI, Hiroshi

IPC分类号： C30B29/06 ,  C03B20/00 ,  C30B15/10

CPC分类号： C30B15/10 ,  C03B19/095 ,  C30B11/002 ,  C30B29/06 ,  C30B35/002 ,  Y10T117/1032

摘要： Buckling of a vitreous silica crucible 12 or inward fall of a sidewall 15 is effectively suppressed. The vitreous silica crucible 12 includes the cylindrical sidewall 15 having an upward-opening rim, a mortar-shaped bottom 16 including a curve, and a round portion 17 connescting the sidewall 15 and the bottom 16. In the vitreous silica crucible 12, the per-unit area thermal resistance in the thickness direction of the sidewall 15 is higher than that of the round portion 17.

摘要翻译： 玻璃状石英坩埚12的弯曲或侧壁15的向内下降被有效地抑制。 玻璃状石英玻璃坩埚12包括具有向上开口的边缘的圆柱形侧壁15，包括曲线的砂浆形底部16和与侧壁15和底部16连接的圆形部分17.在石英玻璃坩埚12中， 侧壁15的厚度方向的单位面积热阻高于圆形部17的热阻。

公开(公告)号：EP2796595A1

公开(公告)日：2014-10-29

申请号：EP12859405.8

申请日：2012-10-31

申请人： SUMCO CORPORATION

发明人： SUDO, Toshiaki ,  SATO, Tadahiro ,  KITAHARA, Ken ,  KITAHARA, Eriko ,  KODAMA, Makiko

IPC分类号： C30B29/06 ,  C03B20/00 ,  G01B11/24

CPC分类号： C30B15/26 ,  C30B15/10 ,  C30B29/06 ,  G01B11/005 ,  G01B11/06 ,  G01B11/24 ,  G01B11/245 ,  G01J3/42 ,  G01J5/58

摘要： The present invention provides a method for evaluating a vitreous silica crucible which can measure a three-dimensional shape of the inner surface of the crucible in a non-destructive manner. According to the present invention, A method for evaluating a vitreous silica crucible, including the steps of: moving an internal ranging section along an inner surface of the vitreous silica crucible in a contactless manner; measuring a distance between the internal ranging section and the inner surface as a distance from the inner surface, by subjecting the inner surface of the crucible to irradiation with laser light and then detecting a reflected light from the inner surface, the laser light being emitted from the internal ranging section in an oblique direction with respect to the inner surface, and the measurement being conducted at a plurality of measuring points along a course of a movement of the internal ranging section; and obtaining a three-dimensional shape of the inner surface of the crucible, by associating three-dimensional coordinates of each of the measuring points with the distance from the inner surface, is provided.

摘要翻译： 本发明提供了一种评价石英玻璃坩埚能够测量以非破坏性的方式在坩埚的内表面的三维形状的方法。 。根据本发明，一种用于评估石英玻璃坩埚，其中包括以下步骤的方法：以非接触方式的石英玻璃坩埚的内表面上，沿着移动到内部测距部; 测量内部测距部和内表面从所述内表面的距离之间的距离，由所述坩埚的内表面用激光进行照射，然后检测来自所述内表面的反射光，激光被从所发射的 内部部分在倾斜方向相对于所述内表面不等，并且测量在沿着内部测距部的移动的过程中测量点上的多个正在进行; 以及获得所述坩埚的内表面的三维形状，由每个具有从所述内表面的距离的测量点的三维坐标相关联，被设置。