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公开(公告)号:EP2701251A4
公开(公告)日:2015-01-28
申请号:EP12773524
申请日:2012-02-07
发明人: KYONO TAKASHI , ENYA YOHEI , SUMITOMO TAKAMICHI , YOSHIZUMI YUSUKE , UENO MASAKI , YANASHIMA KATSUNORI , TASAI KUNIHIKO , NAKAJIMA HIROSHI
IPC分类号: H01S5/343 , H01L21/205
CPC分类号: H01S5/3201 , B82Y20/00 , H01S5/028 , H01S5/2009 , H01S5/2031 , H01S5/3063 , H01S5/3202 , H01S5/3211 , H01S5/34333 , H01S2304/04