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公开(公告)号：EP4343017A3
公开(公告)日：2024-07-17
申请号：EP23195095.7
申请日：2023-09-04
发明人： HONG, Kyongho , KIM, Myungkyu , PARK, Sungho , PARK, Chang-Kon , YOU, Sukbeom , LEE, Dongjae
IPC分类号： C23C14/04 , H01L21/027 , H01L21/308 , H10K71/16 , G03F1/00
CPC分类号： H10K71/166 , C23C14/042 , G03F1/00
摘要： A mask stage includes a stage inclined with respect to a vertical direction perpendicular to a plane defined by a first direction and a second direction intersecting each other, a plurality of first support units disposed between the stage and a mask frame disposed above the stage, and a plurality of second support units disposed on the stage and being adjacent toa lower side of the mask frame. The lower side of the mask frame extends in a first direction, and the second support units are respectively disposed under end portions of the lower side of the mask frame, which are opposite to each other in the first direction.
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2.发明公开
公开(公告)号：EP4339321A1
公开(公告)日：2024-03-20
申请号：EP23195219.3
申请日：2023-09-04
发明人： Kyongho, HONG , PARK, Sungho , LEE, Jungseob , KO, Junhyeuk , KIM, Euigyu , YI, Sang Min , HAN, Sangjin
摘要： A stage unit includes a stage that provides a seating surface and has an opening formed through the seating surface, a first support unit disposed below the opening and coupled to the stage, a second support unit disposed below the opening and coupled to the stage, where the second support unit is spaced apart from the first support unit on a plane, and a flatness measurement unit supported by the first support unit. Each of the first support unit and the second support unit provides a support surface that crosses the seating surface, and the support surface of the first support unit and the support surface of the second support unit are movable in a direction toward and away from the opening.
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公开(公告)号：EP4343017A2
公开(公告)日：2024-03-27
申请号：EP23195095.7
申请日：2023-09-04
发明人： HONG, Kyongho , KIM, Myungkyu , PARK, Sungho , PARK, Chang-Kon , YOU, Sukbeom , LEE, Dongjae
IPC分类号： C23C14/04 , H01L21/027 , H01L21/308 , H10K71/16
摘要： A mask stage includes a stage inclined with respect to a vertical direction perpendicular to a plane defined by a first direction and a second direction intersecting each other, a plurality of first support units disposed between the stage and a mask frame disposed above the stage, and a plurality of second support units disposed on the stage and being adjacent toa lower side of the mask frame. The lower side of the mask frame extends in a first direction, and the second support units are respectively disposed under end portions of the lower side of the mask frame, which are opposite to each other in the first direction.
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