公开(公告)号：EP3813134A1

公开(公告)日：2021-04-28

申请号：EP20174050.3

申请日：2020-05-12

申请人： Samsung Electronics Co., Ltd.

发明人： SONG, Jeonggyu ,  JUNG, Kyooho ,  KIM, Younsoo ,  KIM, Haeryong ,  LEE, Jooho

IPC分类号： H01L49/02 ,  C23C16/34 ,  H01L21/02 ,  H01L27/108

摘要： A capacitor includes: a lower electrode including a metal nitride represented by MM'N, wherein M is a metal element, M' is an element different from M, and N is nitrogen; a dielectric layer on the lower electrode; an interfacial layer between the lower electrode and the dielectric layer and including a metal nitrate represented by MM'ON, wherein M is a metal element, M' is an element different from M, N is nitrogen, and O is oxygen; and an upper electrode on the dielectric layer.