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公开(公告)号:EP3282265B3
公开(公告)日:2024-03-27
申请号:EP16183640.8
申请日:2016-08-10
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公开(公告)号:EP4327355A1
公开(公告)日:2024-02-28
申请号:EP22714122.3
申请日:2022-03-08
申请人: TDK Electronics AG
IPC分类号: H01L21/683 , H01L21/78 , H01L23/31 , H01L23/00 , H01L49/02 , H01G4/00 , H01G4/228 , H01L21/56 , H01L29/861
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公开(公告)号:EP4320634A1
公开(公告)日:2024-02-14
申请号:EP22706499.5
申请日:2022-02-08
发明人: LI, Xia , YANG, Bin , YANG, Haining
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4.
公开(公告)号:EP4302339A1
公开(公告)日:2024-01-10
申请号:EP22712961.6
申请日:2022-03-03
申请人: DIAMFAB , Centre National de la Recherche Scientifique , Institut Polytechnique de Grenoble , UNIVERSITÉ GRENOBLE ALPES
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5.
公开(公告)号:EP4295392A1
公开(公告)日:2023-12-27
申请号:EP22712109.2
申请日:2022-02-16
发明人: CAO, Jianjun , STECKLEIN, Gordon , SHARMA, Muskan
IPC分类号: H01L21/8252 , H01L27/06 , H01L49/02 , H01L29/40 , H01L29/778
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6.
公开(公告)号:EP4289003A1
公开(公告)日:2023-12-13
申请号:EP22705703.1
申请日:2022-01-31
发明人: YUN, Changhan Hobie , KIM, Daniel Daeik , THADESAR, Paragkumar Ajaybhai , PARK, Nosun , VADHAVKAR, Sameer Sunil
IPC分类号: H01L25/065 , H01L25/16 , H01L49/02 , H01L23/31
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公开(公告)号:EP4218052A1
公开(公告)日:2023-08-02
申请号:EP21873137.0
申请日:2021-08-06
申请人: INTEL Corporation
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公开(公告)号:EP4194591A1
公开(公告)日:2023-06-14
申请号:EP21306755.6
申请日:2021-12-13
摘要: A method for manufacturing an electrical device comprising:
- anodizing a portion of an anodizable metal layer so as to obtain an anodic porous oxide region (100) and an anodizable metal region (101) adjoining the anodic porous oxide region, the anodic porous oxide region being thicker than the anodizable metal region,
- depositing a layer of liner material (105) on the anodic porous oxide region and on the anodizable metal region,
- depositing a layer of filler material (106) on the layer of liner material, the filler material being different from the liner material, to obtain a stacked structure having a top surface,
- planarizing the stacked structure from its top surface until reaching the layer of liner material, so as to expose a portion of liner (111) material located above at least a portion of the anodic porous oxide region (112),
- removing the exposed portion of liner material.-
公开(公告)号:EP4191624A1
公开(公告)日:2023-06-07
申请号:EP22188103.0
申请日:2022-08-01
摘要: A dielectric thin film includes a stack structure of a perovskite material layer including at least two Group II elements and a rocksalt layer on the perovskite material layer and including at least two Group II elements. A first content ratio of the at least two Group II elements included in the perovskite material layer may be the same as a second content ratio of the at least two Group II elements included in the rocksalt layer.
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公开(公告)号:EP4156313A1
公开(公告)日:2023-03-29
申请号:EP22183014.4
申请日:2022-07-05
申请人: INTEL Corporation
发明人: LIN, Chia-Ching , CHANG, Sou-Chi , Oguz, Kaan , TUNG, I-Cheng , SEN GUPTA, Arnab , YOUNG, Ian , AVCI, Uygar E. , METZ, Mathew
IPC分类号: H01L49/02
摘要: Embodiments described herein may be related to apparatuses, processes, and techniques related to stacked MIM capacitors with multiple metal and dielectric layers that include insulating spacers on edges of one or more of the multiple layers to prevent unintended electrical coupling between metal layers during manufacturing. The dielectric layers may include Perovskite-based materials. Other embodiments may be described and/or claimed.
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