摘要:
This invention provides a semiconductor device that solves a problem that a pattern of a wiring formed on a back surface of a semiconductor substrate (2) is reflected on an output image. A light receiving element (1) (e.g. a CCD, an infrared ray sensor, a CMOS sensor, or an illumination sensor) is formed on a front surface of a semiconductor substrate (2), and a plurality of ball-shaped conductive terminals (11) is disposed on a back surface of the semiconductor substrate (2). Each of the conductive terminals (11) is electrically connected to a pad electrode (e) on the front surface of the semiconductor substrate (2) through a wiring layer (9). The wiring layers (9) and the conductive terminals (11) are formed on the back surface of the semiconductor substrate (2) except in a region overlapping the light receiving element (1) in a vertical direction, and are not disposed in a region overlapping the light receiving element (1).
摘要:
The invention provides a semiconductor device that solves a problem of reflection of a pattern of a wiring (9) formed on a back surface of a semiconductor substrate (2) on an output image. A reflection layer (8) is formed between a light receiving element (1) and a wiring layer (9), that reflects an infrared ray toward a light receiving element (1) the without transmitting it to the wiring layer (9), the infrared ray entering from a light transparent substrate (6) toward the wiring layer (9) through a semiconductor substrate (2). The reflection layer (8) is formed at least in a region under the light receiving element (1) uniformly or only under the light receiving element (1). Alternatively, an anti-reflection layer having a function of absorbing the entering infrared ray to prevent transmission thereof may be formed instead of the reflection layer.
摘要:
The invention provides a semiconductor device that solves a problem of reflection of a pattern of a wiring (9) formed on a back surface of a semiconductor substrate (2) on an output image. A reflection layer (8) is formed between a light receiving element (1) and a wiring layer (9), that reflects an infrared ray toward a light receiving element (1) the without transmitting it to the wiring layer (9), the infrared ray entering from a light transparent substrate (6) toward the wiring layer (9) through a semiconductor substrate (2). The reflection layer (8) is formed at least in a region under the light receiving element (1) uniformly or only under the light receiving element (1). Alternatively, an anti-reflection layer having a function of absorbing the entering infrared ray to prevent transmission thereof may be formed instead of the reflection layer.
摘要:
This invention provides a semiconductor device that solves a problem that a pattern of a wiring formed on a back surface of a semiconductor substrate (2) is reflected on an output image. A light receiving element (1) (e.g. a CCD, an infrared ray sensor, a CMOS sensor, or an illumination sensor) is formed on a front surface of a semiconductor substrate (2), and a plurality of ball-shaped conductive terminals (11) is disposed on a back surface of the semiconductor substrate (2). Each of the conductive terminals (11) is electrically connected to a pad electrode (e) on the front surface of the semiconductor substrate (2) through a wiring layer (9). The wiring layers (9) and the conductive terminals (11) are formed on the back surface of the semiconductor substrate (2) except in a region overlapping the light receiving element (1) in a vertical direction, and are not disposed in a region overlapping the light receiving element (1).