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公开(公告)号：EP1741557A3
公开(公告)日：2007-07-04
申请号：EP06014159.5
申请日：2006-07-07
发明人： Takabe, Motoki , Sumi, Koji , Yokoyama, Naoto
IPC分类号： B41J2/14
CPC分类号： B41J2/14233 , B41J2002/14241 , B41J2002/14419 , B41J2202/03 , B41J2202/20 , H01L41/0973 , H01L41/1876 , H01L41/318 , H01L41/319
摘要： An actuator device includes: a layer provided on a single crystal silicon (Si) substrate, and made of silicon dioxide (SiO 2 ); at least one buffer layer provided on the layer made of silicon dioxide (SiO 2 ); a base layer provided on the buffer layer, and made of lanthanum nickel oxide (LNO) having the (100) plane orientation; and a piezoelectric element. The piezoelectric element includes: a lower electrode provided on the base layer, and made of platinum (Pt) having the (100) plane orientation; a piezoelectric layer made of a ferroelectric layer whose plane orientation is the (100) orientation, the piezoelectric layer formed on the lower electrode by epitaxial growth where a crystal system of at least one kind selected from a group consisting of a tetragonal system, a monoclinic system and a rhombohedral system dominates the other crystal systems; and an upper electrode provided on the piezoelectric layer.
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公开(公告)号：EP2913187A3
公开(公告)日：2015-12-30
申请号：EP15156943.1
申请日：2015-02-27
发明人： Hirai, Eiju , Yazaki, Shiro , Takabe, Motoki , Fukuzawa, Yuma
IPC分类号： B41J2/14
CPC分类号： B41J2/14233 , B41J2002/14241 , B41J2002/14266 , B41J2002/14459 , B41J2002/14491
摘要： A liquid ejecting head includes a pressure chamber forming substrate in which a plurality of spaces to be pressure chambers in communication with nozzles are provided side by side in a nozzle column direction, in which in a region corresponding to the pressure chamber, a lower electrode film is formed with a width of 50% or more and 80% or less of a width of the pressure chamber in the nozzle column direction and the piezoelectric body layer covers the lower electrode film in the nozzle column direction and is formed with a width of 90% or less of the width of the pressure chamber.
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公开(公告)号：EP2913187A2
公开(公告)日：2015-09-02
申请号：EP15156943.1
申请日：2015-02-27
发明人： Hirai, Eiju , Yazaki, Shiro , Takabe, Motoki , Fukuzawa, Yuma
IPC分类号： B41J2/14
CPC分类号： B41J2/14233 , B41J2002/14241 , B41J2002/14266 , B41J2002/14459 , B41J2002/14491
摘要： A liquid ejecting head includes a pressure chamber forming substrate in which a plurality of spaces to be pressure chambers in communication with nozzles are provided side by side in a nozzle column direction, in which in a region corresponding to the pressure chamber, a lower electrode film is formed with a width of 50% or more and 80% or less of a width of the pressure chamber in the nozzle column direction and the piezoelectric body layer covers the lower electrode film in the nozzle column direction and is formed with a width of 90% or less of the width of the pressure chamber.
摘要翻译： 液体喷射头包括：压力室形成基板，在该压力室形成基板中，在喷嘴列方向上并排设置多个成为与喷嘴连通的压力室的空间，其中，在与压力室对应的区域中，下部电极膜 形成为压力室的喷嘴列方向的宽度的50％以上且80％以下的宽度，压电体层在喷嘴列方向上覆盖下部电极膜，形成宽度90 压力室宽度的％或更少。
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公开(公告)号：EP2623323A1
公开(公告)日：2013-08-07
申请号：EP13153508.0
申请日：2013-01-31
发明人： Hirai, Eiju , Yazaki, Shiro , Sumi, Koji , Takabe, Motoki , Kato, Jiro , Ito, Hiroshi , Shimizu, Toshihiro , Kamijo, Takahiro , Torimoto, Tatsuro , Kojima, Chikara
CPC分类号： B41J2/14233 , B41J2/045 , B41J2/14201 , B41J2/14274 , B41J2/161 , B41J2/1626 , B41J2/1631 , B41J2/1646 , B41J2002/14258 , B41J2002/14491 , H01L41/0471 , H01L41/0805
摘要： A liquid ejection head includes a substrate in which a pressure generating chamber that communicates with a nozzle opening is formed; and a piezoelectric element having a piezoelectric layer, a first electrode that is formed on a surface of the piezoelectric layer on a side of the substrate so as to correspond to the pressure generating chamber, and a second electrode that is formed on a surface of the piezoelectric layer opposite to the side on which the first electrode is formed so as to extend over a plurality of the pressure generating chambers, wherein the second electrode is formed to extend to an outside of the pressure generating chamber in a longitudinal direction of the pressure generating chamber.
摘要翻译： 液体喷射头包括：基板，在该基板中形成有与喷嘴开口连通的压力产生室; 以及压电元件，其具有压电层，第一电极和第二电极，所述第一电极形成在所述压电层的所述基板的一侧上的表面上以对应于所述压力产生室，所述第二电极形成在所述 与形成有所述第一电极的一侧相反的压电体层，以遍布多个所述压力产生室，其中，所述第二电极形成为在所述压力产生的纵向方向上延伸到所述压力产生室的外部 室。
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公开(公告)号：EP1880852A3
公开(公告)日：2008-10-15
申请号：EP07013247.7
申请日：2007-07-06
发明人： Noguchi, Motohisa , Sumi, Koji , Takabe, Motoki , Yokoyama, Naoto
IPC分类号： B41J2/14
CPC分类号： B41J2/14233 , H01L41/0973 , H01L41/1876 , H01L41/317 , H01L41/319
摘要： A piezoelectric device including: a substrate (2); a lower electrode (4) formed over the substrate; a piezoelectric layer (6) formed over the lower electrode and including lead zirconate titanate; and an upper electrode (7) formed over the piezoelectric layer, the lead zirconate titanate having a half-width of a peak of a (100) plane measured by an X-ray diffraction rocking curve method of 10 degrees or more and 25 degrees or less.
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公开(公告)号：EP2913187B1
公开(公告)日：2019-07-17
申请号：EP15156943.1
申请日：2015-02-27
发明人： Hirai, Eiju , Yazaki, Shiro , Takabe, Motoki , Fukuzawa, Yuma
IPC分类号： B41J2/14
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公开(公告)号：EP1741557B1
公开(公告)日：2008-11-05
申请号：EP06014159.5
申请日：2006-07-07
发明人： Takabe, Motoki , Sumi, Koji , Yokoyama, Naoto
IPC分类号： B41J2/14
CPC分类号： B41J2/14233 , B41J2002/14241 , B41J2002/14419 , B41J2202/03 , B41J2202/20 , H01L41/0973 , H01L41/1876 , H01L41/318 , H01L41/319
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8.发明公开Piezoelectric device and liquid jet head 审中-公开Piezoelektrische Vorrichtung undFlüssigkeitsstrahlkopf
公开(公告)号：EP1880852A2
公开(公告)日：2008-01-23
申请号：EP07013247.7
申请日：2007-07-06
发明人： Noguchi, Motohisa , Sumi, Koji , Takabe, Motoki , Yokoyama, Naoto
IPC分类号： B41J2/14
CPC分类号： B41J2/14233 , H01L41/0973 , H01L41/1876 , H01L41/317 , H01L41/319
摘要： A piezoelectric device including: a substrate (2); a lower electrode (4) formed over the substrate; a piezoelectric layer (6) formed over the lower electrode and including lead zirconate titanate; and an upper electrode (7) formed over the piezoelectric layer, the lead zirconate titanate having a half-width of a peak of a (100) plane measured by an X-ray diffraction rocking curve method of 10 degrees or more and 25 degrees or less.
摘要翻译： 一种压电装置，包括：基板（2）; 形成在所述基板上的下电极（4） 形成在所述下电极上并包括锆钛酸铅的压电层（6） 和形成在所述压电体层上的上电极（7），所述钛酸铅钛酸铅具有通过X射线衍射摇摆曲线法测定的（100）面的半峰宽为10度以上且25度， 减。
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9.发明授权Liquid ejection head and liquid ejection apparatus 有权FlüssigkeitsausstoßkopfundFlüssigkeitsausstoßvorrichtung
公开(公告)号：EP2623323B1
公开(公告)日：2015-03-04
申请号：EP13153508.0
申请日：2013-01-31
发明人： Hirai, Eiju , Yazaki, Shiro , Sumi, Koji , Takabe, Motoki , Kato, Jiro , Ito, Hiroshi , Shimizu, Toshihiro , Kamijo, Takahiro , Torimoto, Tatsuro , Kojima, Chikara
CPC分类号： B41J2/14233 , B41J2/045 , B41J2/14201 , B41J2/14274 , B41J2/161 , B41J2/1626 , B41J2/1631 , B41J2/1646 , B41J2002/14258 , B41J2002/14491 , H01L41/0471 , H01L41/0805
摘要： A liquid ejection head includes a substrate in which a pressure generating chamber that communicates with a nozzle opening is formed; and a piezoelectric element having a piezoelectric layer, a first electrode that is formed on a surface of the piezoelectric layer on a side of the substrate so as to correspond to the pressure generating chamber, and a second electrode that is formed on a surface of the piezoelectric layer opposite to the side on which the first electrode is formed so as to extend over a plurality of the pressure generating chambers, wherein the second electrode is formed to extend to an outside of the pressure generating chamber in a longitudinal direction of the pressure generating chamber.
摘要翻译： 液体喷射头包括形成有与喷嘴开口连通的压力发生室的基板; 以及具有压电层的压电元件，形成在压电层的表面上的与压力发生室对应的基板一侧的表面上的第一电极和形成在压电层的表面上的第二电极， 压电层，其与形成有第一电极的一侧相对，以便在多个压力产生室上延伸，其中第二电极形成为在压力产生的纵向方向上延伸到压力发生室的外部 室。
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10.发明公开Method for producing dielectric film, method for producing piezoelectric element, method for producing liquid-jet head, dielectric film, piezoelectric element, and liquid-jet apparatus 审中-公开一种用于生产压电元件产生的电介质膜，处理过程中，一种用于制造喷液头，一个介电膜，压电元件和液体喷射装置
公开(公告)号：EP1708290A3
公开(公告)日：2007-01-31
申请号：EP06006723.8
申请日：2006-03-30
CPC分类号： H01L41/318 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , C23C18/1216 , C23C18/1283 , H01L41/0973 , H01L41/1876 , Y10T29/42 , Y10T29/435 , Y10T29/49155
摘要： A method for producing a dielectric film, comprising: a coating step of coating a colloidal solution containing an organometallic compound containing a metal constituting a dielectric film (70) containing at least a lead component to form a dielectric precursor film (71); a drying step of drying the dielectric precursor film; a degreasing step of degreasing the dielectric precursor film; and a sintering step of sintering the dielectric precursor film to form a dielectric film, and wherein the drying step includes a first drying step of heating the dielectric precursor film to a temperature lower than the boiling point of a solvent, which is a main solvent of the material, and holding the dielectric precursor film at the temperature for a certain period of time to dry the dielectric precursor film, and a second drying step of drying the dielectric precursor film at a temperature in the range of 140°C to 170°C, the degreasing step is performed at a degreasing temperature of 350°C to 450°C and at a heating-up rate of 15 [°C/sec] or higher, and the sintering step is performed at a heating-up rate of 100 [°C/sec] to 150 [°C/sec].
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