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公开(公告)号：EP1939661A1
公开(公告)日：2008-07-02
申请号：EP06811924.7
申请日：2006-10-17
IPC分类号： G02B7/04
摘要： The invention relates to a lens unit and a lens driving apparatus, which enable lenses to be displaced smoothly without increasing a restriction on a distance between the lenses and moreover, prevent positioning accuracy of the lenses from decreasing. First to third guide members (25 to 27) have first to third axis lines (31 to 33), and the first to third axis lines (31 to 33) are arranged in parallel with each other. A first lens holder (28) has a first lens (35) held by a first lens holding portion (35) with a first main sliding portion (37) guided by sliding on the first guide member (25), and a first sub sliding portion (38) guided by sliding on the third guide member (27). A second lens holder (29) has a second lens (45) held coaxially with the first lens (35) by a second lens (45) holding portion with a second main sliding portion (47) guided by sliding on the second guide member (26), and a second sub sliding portion (48) guided by the third guide member (27).
摘要翻译： 本发明涉及透镜单元和透镜驱动装置，其能够使透镜平滑地移动，而不增加对透镜之间的距离的限制，此外，防止透镜的定位精度降低。 第一至第三导向件（25至27）具有第一至第三轴线（31至33），并且第一至第三轴线（31至33）彼此平行地布置。 第一透镜架（28）具有由第一透镜保持部（35）保持的第一透镜（35），第一主滑动部（37）在第一引导构件（25）上滑动引导，第一副滑动 在所述第三引导构件（27）上滑动引导的所述部分（38）。 第二透镜架（29）具有通过第二透镜（45）保持部与第一透镜（35）保持同轴的第二透镜（45），第二透镜保持部具有通过在第二引导构件上滑动而引导的第二主滑动部（47） 26）和由第三引导构件（27）引导的第二副滑动部分（48）。
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公开(公告)号：EP1939661B1
公开(公告)日：2011-12-14
申请号：EP06811924.7
申请日：2006-10-17
IPC分类号： G02B7/04
摘要： It is possible to provide a lens unit and a lens drive device capable of smoothly displacing a lens and suppressing lowering of lens position accuracy without increasing the limit on the distance between lenses. A first to third guide member (25 to 27) have a first to a third axis line (31 to 33), which are arranged parallel to one another. A first lens holding body (28) holds a first lens (35) by a first lens (35) holding unit and is guided to slide along the first guide member (25) by a first main slide unit (37) and slide along a third guide member (27) by a first sub slide unit (38). A second lens holding body (29) holds a second lens (45) coaxially with the first lens (35) by a second lens (45) holding unit and is guided to slide along a second guide member (26) by a second main slide unit (47) and slide along a third guide member (27) by a second sub slide unit (48).
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3.发明公开PATTERN EXPOSING SYSTEM AND PATTERN EXPOSING METHOD 审中-公开STRUKTURBELICHTUNGSSYSTEM UND STRUKTURBELICHTUNGSVERFAHREN
公开(公告)号：EP1653280A1
公开(公告)日：2006-05-03
申请号：EP04745543.1
申请日：2004-06-03
发明人： KOKUBO, Fumio , NISHIKAWA, Masayuki
IPC分类号： G03F7/00
CPC分类号： G03F7/70791 , G03F7/7005 , G03F7/70258 , G03F7/70275 , G03F7/70383 , G03F7/70391 , G03F7/70641 , G03F9/7026
摘要： A pattern exposing apparatus includes a plurality of optical units, a control section sending to each optical unit a signal for controlling an exposure pattern width to be exposed according to pattern data concerning a target exposure pattern, and a compensation operation memory 24 for compensating the control signal sent from the control means to each optical unit according to the characteristics of each optical unit. In the pattern exposing apparatus including a plurality of optical units, a pattern faithful to a target pattern can be exposed regardless of the characteristics of each optical unit.
摘要翻译： 图案曝光装置包括多个光学单元，控制部分根据关于目标曝光图案的图案数据向每个光学单元发送用于控制要曝光的曝光图案宽度的信号;以及补偿操作存储器24，用于补偿控制 信号
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