公开(公告)号：EP4043613A1

公开(公告)日：2022-08-17

申请号：EP20875257.6

申请日：2020-09-03

申请人： Showa Denko K.K.

发明人： MIYAISHI, So ,  OKUBO, Masahiro ,  YOSHIMURA, Masayuki ,  SAKANE, Wataru ,  TANAKA, Teppei ,  NAKAMURA, Saeko ,  YAMAKI, Saori

IPC分类号： C23C28/00 ,  C23C28/04 ,  C23C14/02 ,  C23C14/06 ,  C23C14/16 ,  C23C14/34 ,  C23C14/35 ,  C25D13/00 ,  C25D13/02 ,  C25D13/20 ,  C25D13/22 ,  H01L21/302

摘要： There is provided a corrosion-resistant member in which a corrosion-resistant coating is difficult to peel off from a base material even when subjected to a thermal history. A corrosion-resistant member includes: a metal base material (10); a corrosion-resistant coating (30) formed on the surface of the base material (10); and a buffer layer (20) formed between the base material (10) and the corrosion-resistant coating (30). The base material (10) contains a main element which is an element having the highest mass content ratio among elements contained in the base material (10) and a trace element which is an element having a mass content ratio of 1% by mass or less. The corrosion-resistant coating (30) contains at least one kind selected from magnesium fluoride, aluminum fluoride, and aluminum oxide. The buffer layer (20) contains an element of the same kind as the trace element, and the content ratio obtained by energy dispersive X-ray analysis of the element of the same kind as the trace element contained in the buffer layer (20) is 2% by mass or more and 99% by mass or less.