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公开(公告)号:EP4416522A1
公开(公告)日:2024-08-21
申请号:EP22754579.5
申请日:2022-07-26
Applicant: Sony Semiconductor Solutions Corporation
Inventor: EBIKO, Yoshiki , MIZUTA, Kyohei , KOMURO, Yutaro , YASU, Yohtaro , NARISAWA, Sousuke , YOKOGAWA, Sozo , TODA, Atsushi , GOI, Kazuhiro
IPC: G01S7/4912 , G01S7/4911 , G01S17/34 , H01L25/04 , H01L25/16 , G01S7/481
CPC classification number: G01S7/4917 , G01S7/4911 , G01S17/34 , H01L25/167 , G01S17/931 , G01S7/4818 , G02B6/124 , G02B2006/1214720130101 , G02B2006/121520130101