LASER INTERFEROMETER
    3.
    发明公开

    公开(公告)号:EP4379314A1

    公开(公告)日:2024-06-05

    申请号:EP23212675.5

    申请日:2023-11-28

    Abstract: A laser interferometer includes: a laser light source configured to emit laser light toward an object; an optical modulator including a vibrator configured to modulate the laser light using the vibrator and superimpose a modulation signal on the laser light; a photodetector configured to receive the laser light including a sample signal derived from the object and the modulation signal, and to output a light reception signal; a demodulation circuit configured to demodulate the sample signal from the light reception signal based on a reference signal; and an oscillation circuit configured to operate using the vibrator as a signal source and output the reference signal to the demodulation circuit. The vibrator includes a vibration substrate having a base portion and a vibration unit coupled to the base portion. The vibration unit vibrates along an in-plane direction of the vibration substrate, the vibration unit includes a side surface intersecting with the in-plane direction.

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