公开(公告)号：EP3174089A1

公开(公告)日：2017-05-31

申请号：EP15824999.5

申请日：2015-07-08

申请人： Sumitomo Chemical Company Limited

发明人： FUJIKURA Hajime ,  KONNO Taichiro ,  NONAKA Takehiro ,  NUMATA Takayuki

IPC分类号： H01L21/677 ,  B65G49/07 ,  C23C16/44 ,  H01L21/205

CPC分类号： C23C16/46 ,  C23C16/44 ,  H01L21/205 ,  H01L21/67109 ,  H01L21/67115 ,  H01L21/67173 ,  H01L21/67706 ,  H01L21/67739 ,  H01L21/6776

摘要： Techniques are provided to improve the quality of the thin films deposited on substrates. A substrate transporting mechanism is configured to transport a plurality of substrates arranged in a line along a transport path extending in a first container from an entrance to an exit, and to load and unload substrates into and out of a second container in order. The driving units to drive the substrate transporting mechanism are configured to be detachable from the substrate transporting mechanism provided in the first container and are respectively provided in a substrate loading chamber and a substrate unloading chamber.

摘要翻译： 提供技术来改善沉积在基底上的薄膜的质量。 衬底传送机构被构造成沿着在第一容器中延伸的传送路径从入口到出口地布置成一条线的多个衬底传送，并且将衬底依次装入第二容器和从第二容器卸载。 用于驱动基板输送机构的驱动单元被构造成可从设置在第一容器中的基板输送机构拆卸并且分别设置在基板装载室和基板卸载室中。