公开(公告)号：EP3985143A1

公开(公告)日：2022-04-20

申请号：EP20836223.6

申请日：2020-07-10

申请人： Suzhou Maizheng Technology Co. Ltd

发明人： SUN, Jian ,  ZHOU, Jian ,  CHEN, Chen

IPC分类号： C23C16/458

摘要： Disclosed is a composite tray, comprising support units and a substrate used for receiving the support units. Each support unit is provided with a silicon wafer placement area used for receiving a silicon wafer; and the substrate and the support units are made of different materials. The composite tray is made of two different materials, and can overcome the defect of a composite tray made of a single material, the performance of the composite tray in the aspects of strength, heat insulation, heat conduction and the like can be met, the cost is lower, and batch use is facilitated.