公开(公告)号：EP3241002A4

公开(公告)日：2018-01-10

申请号：EP15875303

申请日：2015-12-18

Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

Inventor： VARPULA AAPO ,  HOLMLUND CHRISTER ,  RISSANEN ANNA

IPC: G01J3/26 ,  B81B7/00 ,  G02B5/08 ,  G02B5/28 ,  G02B26/00

CPC classification number: G01J3/26 ,  B81B7/00 ,  G01J3/0286 ,  G01J3/0297 ,  G02B5/0825 ,  G02B5/284 ,  G02B27/142

Abstract: A mirror plate (100) for a Fabry-Perot interferometer (300) comprises: - a substrate (50), which comprises silicon (Si), - a semi-transparent reflective coating (110) implemented on the substrate (50), - a de-coupling structure (DC1) formed on the substrate (50), - a first sensor electrode (G1a) formed on top of the de-coupling structure (DC1), and - a second sensor electrode (G1b), wherein the de-coupling structure (DC1) comprises an electrically insulating layer (60a), and a first stabilizing electrode (G0a), which is located between the first sensor electrode (G1a) and the substrate (50).