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公开(公告)号:EP0565786A1
公开(公告)日:1993-10-20
申请号:EP92303288.2
申请日:1992-04-13
CPC分类号: B01J3/03 , C23C14/568 , F16K3/12 , F16K41/10 , F16K51/02
摘要: A vacuum gate valve device for opening and closing a vacuum path includes a valve casing (60) with a valve body (30,40) provided in the valve casing, the valve body being allowed to reciprocate between two positions to close and open the vacuum path. A bonnet flange (9) closes the casing and a driving means (10) is provided on the bonnet flange for reciprocally driving the valve body. The driving means (10) has a stem shaft (3) which is loosely inserted into a through hole (11) of the bonnet flange and is coupled with the valve body. A member (4) isolates a sliding portion of the driving means from the vacuum path.
摘要翻译: 用于打开和关闭真空通道的真空闸阀装置包括具有设置在阀壳体中的阀体(30,40)的阀壳体(60),允许阀体在两个位置之间往复运动以关闭和打开真空 路径。 发动机罩法兰(9)关闭壳体,并且在发动机罩法兰上设置有驱动装置(10),用于往复驱动阀体。 驱动装置(10)具有主轴(3),其松动地插入阀盖凸缘的通孔(11)中并与阀体联接。 构件(4)将驱动装置的滑动部分与真空路径隔离。
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公开(公告)号:EP0565786B1
公开(公告)日:1998-03-25
申请号:EP92303288.2
申请日:1992-04-13
CPC分类号: B01J3/03 , C23C14/568 , F16K3/12 , F16K41/10 , F16K51/02
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