公开(公告)号：EP0878013A2

公开(公告)日：1998-11-18

申请号：EP96920094.0

申请日：1996-01-19

申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA ,  CALIFORNIA INSTITUTE OF TECHNOLOGY

发明人： HO, Chih-Ming ,  MIU, Denny, K. ,  LEU, Jeremy, Tzong-Shyng ,  MILLER, Raanan ,  DESAI, Amish ,  LIU, Chang ,  TSAO, Tom ,  TAI, Yu-Chong

IPC分类号： H02K57

CPC分类号： H02K99/00

摘要： A surface micromachined micromagnetic actuator is provided with a flap (14) using magnetic force as the actuating force. The flap is coupled by one or more beams (16) to a substrate and is cantilevered over the substrate. A Permalloy layer or a magnetic coil (12) is disposed on the flap such that when the flap is placed in a magnetic field, it can be caused to selectively interact and rotate out of the plane of the magnetic actuator. The cantilevered flap is released from the underlying substrate by etching out an underlying sacrificial layer disposed between the flap and the substrate (22). The etched out and now cantilevered flap is magnetically actuated to maintain it out of contact with the substrate while the just etched device is dried in order to obtain high release yields.

公开(公告)号：EP0878013B1

公开(公告)日：2004-05-06

申请号：EP96920094.8

申请日：1996-01-19

申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA ,  CALIFORNIA INSTITUTE OF TECHNOLOGY

发明人： HO, Chih-Ming ,  MIU, Denny, K. ,  LEU, Jeremy, Tzong-Shyng ,  MILLER, Raanan ,  DESAI, Amish ,  LIU, Chang ,  TSAO, Tom ,  TAI, Yu-Chong

IPC分类号： H01F7/00 ,  H02K57/00

CPC分类号： H02K99/00