公开(公告)号：EP0878013B1

公开(公告)日：2004-05-06

申请号：EP96920094.8

申请日：1996-01-19

申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA ,  CALIFORNIA INSTITUTE OF TECHNOLOGY

发明人： HO, Chih-Ming ,  MIU, Denny, K. ,  LEU, Jeremy, Tzong-Shyng ,  MILLER, Raanan ,  DESAI, Amish ,  LIU, Chang ,  TSAO, Tom ,  TAI, Yu-Chong

IPC分类号： H01F7/00 ,  H02K57/00

CPC分类号： H02K99/00

公开(公告)号：EP0878013A2

公开(公告)日：1998-11-18

申请号：EP96920094.0

申请日：1996-01-19

申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA ,  CALIFORNIA INSTITUTE OF TECHNOLOGY

发明人： HO, Chih-Ming ,  MIU, Denny, K. ,  LEU, Jeremy, Tzong-Shyng ,  MILLER, Raanan ,  DESAI, Amish ,  LIU, Chang ,  TSAO, Tom ,  TAI, Yu-Chong

IPC分类号： H02K57

CPC分类号： H02K99/00

摘要： A surface micromachined micromagnetic actuator is provided with a flap (14) using magnetic force as the actuating force. The flap is coupled by one or more beams (16) to a substrate and is cantilevered over the substrate. A Permalloy layer or a magnetic coil (12) is disposed on the flap such that when the flap is placed in a magnetic field, it can be caused to selectively interact and rotate out of the plane of the magnetic actuator. The cantilevered flap is released from the underlying substrate by etching out an underlying sacrificial layer disposed between the flap and the substrate (22). The etched out and now cantilevered flap is magnetically actuated to maintain it out of contact with the substrate while the just etched device is dried in order to obtain high release yields.

公开(公告)号：EP0958593A1

公开(公告)日：1999-11-24

申请号：EP98906009.0

申请日：1998-01-27

申请人： CALIFORNIA INSTITUTE OF TECHNOLOGY

发明人： TAI, Yu-Chong ,  DESAI, Amish ,  LEE, Terry ,  DAVIS, Mike

IPC分类号： H01J49

CPC分类号： H01J49/167 ,  H01J49/0018 ,  H01J49/04

摘要： A MEMS electrospray nozzle (320) for mass spectroscopy is disclosed. The nozzle has: a channel field (380) having an inner diameter between 0.3-3 νm; a nozzle tip (390); and a filter structure (370) positioned on the channel field. A method of fabricating the nozzle is also disclosed.

摘要翻译： 公开了用于质谱的MEMS电喷嘴（320）。 该喷嘴具有：内径在0.3-3νm之间的通道区域（380） 一个喷嘴尖端（390）; 和位于通道场上的滤波器结构（370）。 还公开了制造喷嘴的方法。

公开(公告)号：EP1030733A1

公开(公告)日：2000-08-30

申请号：EP98906253.4

申请日：1998-02-05

申请人： CALIFORNIA INSTITUTE OF TECHNOLOGY

发明人： DESAI, Amish ,  YANG, Xing ,  TAI, Yu-Chong ,  MARZLUFF, Elaine ,  BOCKENKAMP, Dirk ,  MAYO, Stephen

IPC分类号： B01F5/02 ,  B01J19/00

CPC分类号： B01L3/5027 ,  B01F5/0256 ,  B01F5/0602 ,  B01F13/0059 ,  B01F2005/0025 ,  B01F2005/0621 ,  B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00797 ,  B01L2300/0816 ,  B01L2300/0867 ,  B01L2300/0883 ,  B01L2400/0487 ,  B01L2400/084 ,  Y10S366/03

摘要： A micromachined, high Reynolds number, sub-millisecond liquid mixer for the study of chemical reaction kinetics. This bulk micromachined silicon mixer is capable of initiating and quenching chemical reactions in intervals as short as 100 νs. The mixer chip contains two tee mixers (120, 130) connected by one channel which serves a reaction chamber (140). Each tee mixer consists of opposing channels (110, 120) where liquids meet head-on and exit into a third channel (150) forming the base of a 'T'.