公开(公告)号：EP0971000B1

公开(公告)日：2004-08-25

申请号：EP98910973.1

申请日：1998-03-25

申请人： Tokyo Electron Limited ,  Taisei Corporation

发明人： MATSUO, Takenobu ,  WAKABAYASHI, Tsuyoshi ,  SAITO, Misako ,  KOBAYASHI, Sadao ,  WAKAYAMA, Yoshihide ,  IMAFUKU, Masayuki

IPC分类号： C08L101/00 ,  C08K5/13 ,  C08K5/05 ,  H01L21/02

CPC分类号： C08K5/0075

公开(公告)号：EP0957514A1

公开(公告)日：1999-11-17

申请号：EP97908518.0

申请日：1997-03-27

申请人： TOKYO ELECTRON LIMITED ,  TAISEI CORPORATION

发明人： SAITO, Misako ,  MATSUO, Takenobu ,  WAKABAYASHI, Tsuyoshi ,  KOBAYASHI, Sadao ,  WAKAYAMA, Yoshihide ,  IMAFUKU, Masayuki

IPC分类号： H01L21/68 ,  A43B3/00 ,  A41D13/02

CPC分类号： H01L21/67757 ,  A43B1/14 ,  A43B3/163 ,  H01L21/67 ,  H01L21/67366 ,  H01L21/67396

摘要： There are instruments used for handling a substrate in a clean room at room temperature and atmospheric pressure, which contain a resin base and at least one additive selected from the group consisting of a lubricant, a plasticizer, an anti-oxidizing agent and an antistatic agent, and the additives do not generate gaseous organic material compound under conditions of room temperature and atmospheric pressure.

摘要翻译： 在室温和大气压下在洁净室内处理基材的仪器包含树脂基材和至少一种选自润滑剂，增塑剂，抗氧化剂和抗静电剂的添加剂 ，并且添加剂在室温和大气压条件下不产生气体有机材料化合物。

公开(公告)号：EP0971000A1

公开(公告)日：2000-01-12

申请号：EP98910973.1

申请日：1998-03-25

申请人： Tokyo Electron Limited ,  Taisei Corporation

发明人： MATSUO, Takenobu ,  WAKABAYASHI, Tsuyoshi ,  SAITO, Misako ,  KOBAYASHI, Sadao ,  WAKAYAMA, Yoshihide ,  IMAFUKU, Masayuki

IPC分类号： C08L101/00 ,  C08K5/13 ,  C08K5/05

CPC分类号： C08K5/0075

摘要： An electronic/electric part used in a clean room in which the atmosphere is controlled to process a substrate in a semiconductor device industry, which contains a resin base material and additives added to the resin base material. The additives contain one or more materials selected from the group consisting of an anti-electrostatic agent made of a nonionic compound of a molecular weight of 350 or higher, an anti-oxidizing agent made of a phenolic compound of a molecular weight of 300 or higher, a lubricant, a plasticizer, a fire retardant, and a water repellent. The additives hardly releases gaseous organic substances from the resin base material under a condition where the part is used.

摘要翻译： 在洁净室中，其中所述气氛控制为处理基板在半导体器件行业，其中包含加入到树脂基体材料的树脂基体材料和添加剂中使用的电子/电气部件。 所述添加剂包含选自抗静电剂组成的组中取得的350或更高的抗氧化剂，分子量的非离子性化合物中选择的一种或多种材料制成的300或更高的分子量的酚化合物的 ，润滑剂，增塑剂，阻燃剂和防水剂。 添加剂几乎不释放气态有机物质从树脂基材，在使用零件的条件下。

公开(公告)号：EP1400761B1

公开(公告)日：2010-05-12

申请号：EP02741307.9

申请日：2002-06-26

申请人： Nichias Co., Ltd. ,  TOKYO ELECTRON LIMITED

发明人： TERADA, Isao ,  TANAKA, Minoru ,  MATUMURA, Yuji ,  KOBAYASHI, Sadao ,  MORI, Naoki ,  ITOH, Hiromu ,  WAKAYAMA, Yoshihide ,  SUENAGA, Osamu

IPC分类号： F24F7/06 ,  F24F3/14 ,  B01D53/75

CPC分类号： F24F3/14 ,  B01D47/00 ,  B01D53/75 ,  F24F2003/1617 ,  Y02A50/21

摘要： A method of cleaning air, comprising a humidifying step for humidifying the air containing chemical contaminants by a humidifying means and taking a part of the gaseous contaminants in the air into excessive moisture to remove the contaminants from the air and a dehumidifying step for dehumidifying the humidified air by a condensing means and taking the gaseous chemical contaminants remaining, without being removed, in the humidifying step into condensed water for removal, wherein, by using a oblique honeycomb having both front and rear faces and both upper and lower faces disposed in open state, air is led from the front opening part of the oblique honeycomb and water is fed from the upper opening part thereof to one or both of the humidifying and condensing means.