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1.发明公开CLEANING APPARATUS, CLEANING METHOD, PATTERN FORMING APPARATUS AND PATTERN FORMING METHOD 审中-公开清洁设备，清洁方法，结构生产设备和构筑物的制作过程
公开(公告)号：EP1990693A4
公开(公告)日：2010-03-17
申请号：EP07714780
申请日：2007-02-22
Applicant: TOSHIBA KK
Inventor： IIDA ATSUKO , ISHII KOICHI , SAITO MITSUNAGA , TAKAHASHI KEN , TAJIMA YOSHIHIRO , SHINJIYO YASUSHI , TASHIRO SHIGEYUKI , HIROSAWA DAIJI
CPC classification number: B41F35/02 , B41M1/10 , B41P2235/26 , G03G21/0088 , G03G21/10
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