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公开(公告)号：EP2740788A4
公开(公告)日：2015-08-19
申请号：EP12822401
申请日：2012-08-03
申请人： TOSHIBA KK
发明人： TAKAHASHI MASAYOSHI , HASHIMOTO KOJI , NIKAIDO MASARU , GEMMA NOBUHIRO , OKADA JUN , HIROSAWA DAIJI , YAMAMOTO KEIICHI , KUWABARA TETSUYA , TAKASE MADOKA , SHIMOJO AKIKO , NAKAMURA AKIYOSHI
IPC分类号： C12Q1/68 , B01L3/00 , B01L7/00 , G01N27/327
CPC分类号： C12Q1/6825 , B01J2219/00452 , B01J2219/00497 , B01J2219/00596 , B01J2219/00608 , B01J2219/00621 , B01J2219/00657 , B01J2219/00659 , B01J2219/00722 , B01L3/502761 , B01L7/525 , B01L2200/16 , B01L2300/0636 , B01L2300/0645 , B01L2300/0803 , B01L2300/0816 , B01L2300/0819 , B01L2300/0883 , B01L2300/163
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公开(公告)号：EP2089874A4
公开(公告)日：2013-01-23
申请号：EP07832903
申请日：2007-11-30
申请人： TOSHIBA KK
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3.发明公开CLEANING APPARATUS, CLEANING METHOD, PATTERN FORMING APPARATUS AND PATTERN FORMING METHOD 审中-公开清洁设备，清洁方法，结构生产设备和构筑物的制作过程
公开(公告)号：EP1990693A4
公开(公告)日：2010-03-17
申请号：EP07714780
申请日：2007-02-22
申请人： TOSHIBA KK
发明人： IIDA ATSUKO , ISHII KOICHI , SAITO MITSUNAGA , TAKAHASHI KEN , TAJIMA YOSHIHIRO , SHINJIYO YASUSHI , TASHIRO SHIGEYUKI , HIROSAWA DAIJI
CPC分类号： B41F35/02 , B41M1/10 , B41P2235/26 , G03G21/0088 , G03G21/10
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4.发明公开METHOD OF PRODUCING SPACER STRUCTURE BODY, METHOD OF FILLING SPACER FORMING MATERIAL, DEVICE FOR FILLING SPACER FORMING MATERIAL, FORMING DIE, AND VACUUM VESSEL 审中-公开用于生产ABSTANDSSTRUKTURKORPERS，方法填补了一项空白元件形成材料，装置用于填补了一项空白元件形成材料，模具及VAKUUMBEHALTER
公开(公告)号：EP1542257A4
公开(公告)日：2007-11-14
申请号：EP03741189
申请日：2003-07-03
申请人： TOSHIBA KK
发明人： HIROSAWA DAIJI , UEDA YUKINORI , TAKATORI KOJI , NIKAIDO MASARU , ISHIKAWA SATOSHI , HIRAHARA SACHIKO
IPC分类号： B29C35/08 , B29C39/10 , B29C41/04 , B29C41/20 , B29C71/02 , H01J9/24 , H01J29/86 , H01J31/12
CPC分类号： B29C39/10 , B29C33/405 , B29C2035/0827 , H01J9/242 , H01J29/864 , H01J31/127 , H01J2329/8625 , H01J2329/863
摘要： A plate-like grid (24) where beam passage holes (26) are formed and a plate-like forming die (36a) are provided. The forming die has spacer forming holes (40a) and has hole forming portions (56a) that are located around the individual spacer forming holes so as to define the spacer forming holes and are formed of an ultraviolet ray transmission material. The forming die is brought into close contact with a surface of the grid to form an assemble body comprising the forming die and the grid. Either before or after the assemble body is formed, a spacer forming material (46) with ultraviolet curing characteristics is filled in each of the spacer forming holes of the forming die. Ultraviolet rays are irradiated, directly or by transmitting them through the hole forming portions, to the spacer forming material in order to cure the space forming material. After that, the forming die is separated from the grid with the cured spacer forming material left on the grid.
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