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1.
公开(公告)号:EP2089874A4
公开(公告)日:2013-01-23
申请号:EP07832903
申请日:2007-11-30
Applicant: TOSHIBA KK
Inventor: TASHIRO SHIGEYUKI , HIROSAWA DAIJI , SHIRAI HIROSHI , HOSOYA MASAHIRO , SAITO MITSUNAGA , NAKAO HIDEYUKI , ISHII KOICHI , SHINJO YASUSHI
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2.CLEANING APPARATUS, CLEANING METHOD, PATTERN FORMING APPARATUS AND PATTERN FORMING METHOD 审中-公开
Title translation: 清洁设备,清洁方法,结构生产设备和构筑物的制作过程公开(公告)号:EP1990693A4
公开(公告)日:2010-03-17
申请号:EP07714780
申请日:2007-02-22
Applicant: TOSHIBA KK
Inventor: IIDA ATSUKO , ISHII KOICHI , SAITO MITSUNAGA , TAKAHASHI KEN , TAJIMA YOSHIHIRO , SHINJIYO YASUSHI , TASHIRO SHIGEYUKI , HIROSAWA DAIJI
CPC classification number: B41F35/02 , B41M1/10 , B41P2235/26 , G03G21/0088 , G03G21/10
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