SINGLE CRYSTAL PULLING DEVICE AND LOW HEAT CONDUCTIVE MEMBER TO BE USED IN SINGLE CRYSTAL PULLING DEVICE
    1.
    发明公开
    SINGLE CRYSTAL PULLING DEVICE AND LOW HEAT CONDUCTIVE MEMBER TO BE USED IN SINGLE CRYSTAL PULLING DEVICE 有权
    装置:用于使用在设备中进行繁殖育种用单晶硅单晶和低温热传导件

    公开(公告)号:EP2644755A4

    公开(公告)日:2014-05-14

    申请号:EP11843787

    申请日:2011-11-21

    申请人: TOYO TANSO CO

    摘要: A single crystal pulling apparatus (1) has a quartz crucible (2) for accommodating silicon melt (3), a graphite crucible (4) for retaining the quartz crucible (2), a tray (5) for securing and holding the graphite crucible (4) from below, and a crucible rotating shaft (6) for supporting the tray (5) from below and for elevating and lowering the tray (5) and the crucibles (2), (4) while rotating them. A low heat conductive member (10) is interposed on a joint surface between the tray (5) and the crucible rotating shaft (6). The low heat conductive member (10) is formed in a substantially tubular shape, and is interposed in such a manner that a protruding portion of the crucible rotating shaft (6) is inserted through a center hole of the low heat conductive member (10). Thereby, a gap portion (11) is formed below a bottom portion of the tray (5).