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公开(公告)号：EP2042622A4
公开(公告)日：2014-06-11
申请号：EP07790482
申请日：2007-07-09
申请人： TOYO TANSO CO
发明人： HIROSE YOSHIAKI , YUKI TETSUYA , KONDO TERUHISA , OKADA OSAMU
CPC分类号： F27B14/10 , C30B15/10 , Y10T117/10 , Y10T117/1004 , Y10T117/1024 , Y10T117/1052
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2.发明公开SINGLE CRYSTAL PULLING DEVICE AND LOW HEAT CONDUCTIVE MEMBER TO BE USED IN SINGLE CRYSTAL PULLING DEVICE 有权装置：用于使用在设备中进行繁殖育种用单晶硅单晶和低温热传导件
公开(公告)号：EP2644755A4
公开(公告)日：2014-05-14
申请号：EP11843787
申请日：2011-11-21
申请人： TOYO TANSO CO
发明人： OKADA OSAMU , KAWAKAMI MASAAKI
CPC分类号： C30B15/14 , C30B15/10 , C30B15/30 , C30B29/06 , Y10T117/1032 , Y10T117/1068 , Y10T117/1072
摘要： A single crystal pulling apparatus (1) has a quartz crucible (2) for accommodating silicon melt (3), a graphite crucible (4) for retaining the quartz crucible (2), a tray (5) for securing and holding the graphite crucible (4) from below, and a crucible rotating shaft (6) for supporting the tray (5) from below and for elevating and lowering the tray (5) and the crucibles (2), (4) while rotating them. A low heat conductive member (10) is interposed on a joint surface between the tray (5) and the crucible rotating shaft (6). The low heat conductive member (10) is formed in a substantially tubular shape, and is interposed in such a manner that a protruding portion of the crucible rotating shaft (6) is inserted through a center hole of the low heat conductive member (10). Thereby, a gap portion (11) is formed below a bottom portion of the tray (5).
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