公开(公告)号：EP1284531A2

公开(公告)日：2003-02-19

申请号：EP02014126.3

申请日：2002-06-24

申请人： TRW Inc.

发明人： Tran, Dean (NMI) ,  Anderson, Eric R. ,  Vendura, George J.

IPC分类号： H01S5/026 ,  H01S5/183 ,  H01L27/15

CPC分类号： H01S5/0264 ,  H01S5/0207 ,  H01S5/021 ,  H01S5/0286 ,  H01S5/18305 ,  H01S5/3031

摘要： A device and a process for integrating light energy transmit and/or receive functions with active devices such as GaAs or InP devices or light emitting devices, such as lasers. The device and process includes forming a passivation layer on top of the active device and forming a silicon photodetector on top of the passivation layer. The photodetector may be formed utilizing a standard solar cell growth process and may be formed as a mesa on top of the active or light-emitting device, thus forming a relatively less complicated semiconductor with an integrated monitoring device.

摘要翻译： 用于将光能发射和/或接收功能与诸如GaAs或InP器件的有源器件或诸如激光器的发光器件集成的器件和过程。 该器件和工艺包括在有源器件的顶部形成钝化层，并在钝化层顶部形成硅光电检测器。 光电检测器可以利用标准的太阳能电池生长工艺形成，并且可以在有源或发光器件的顶部形成为台面，由此形成具有集成监视器件的相对较不复杂的半导体。