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1.发明公开COMPOSITION FOR FORMING CURED FILM PATTERN, AND METHOD FOR PRODUCING CURED FILM PATTERN BY USING THE SAME 审中-公开组合物技术形成固化膜的结构及方法的固化膜结构进行了本
公开(公告)号：EP2116902A1
公开(公告)日：2009-11-11
申请号：EP08710841.1
申请日：2008-02-06
CPC分类号： G03F7/027 , G03F7/322 , G03F7/40 , H05K3/0023 , H05K3/287 , H05K2203/124
摘要： A composition for forming a cured film pattern comprises a combination of: an alkaline developable photocurable and thermosetting composition containing no thermal curing catalyst; and a developing solution comprising an aqueous solution of a basic curing catalyst of a nitrogen-containing heterocyclic compound for promoting a thermosetting reaction so that it has a long pot-life (useful life) after mixing of a main agent and a hardener or has excellent storage stability as a one-package composition. Preferably, the basic curing catalyst is a heterocyclic compound having an amidine structure. A film of the photocurable and thermosetting composition is selectively exposed to an actinic energy ray and then developed with the developing solution to remove an unexposed area of the film. At this time, the basic curing catalyst penetrates into the photocured film to effect doping. As a result, the film becomes excellent in thermosetting properties besides the patterning properties by development.
摘要翻译： 一种用于形成固化膜图案组合物包含以下的组合：一个碱显影的光固化和不含热固化催化剂的热固性组合物; 以及用于宣传婷含氮杂环化合物的热固性反应，从而做到了具有主剂的混合后一个长的适用期（使用寿命）和硬化剂或具有优异的碱性固化催化剂的wässrige溶液的显影溶液，其包含 储存稳定性作为单组分组合物。 优选地，所述碱性固化催化剂为具有脒在结构的杂环化合物。 电影的光固化和热固性组合物的暴露，以选择性地对光化能量射线，然后用显影溶液显影在胶片的未曝光区域除去。 此时，碱性固化催化剂渗透到光固化膜，以实现掺杂。 其结果是，该薄膜变得优异在除了通过显影图案化特性热固性性质。
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