利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

5 条记录 (耗时 0.016 秒)

    AC-EXCITED MICROCAVITY DISCHARGE DEVICE AND METHOD
    1.
    发明公开
    AC-EXCITED MICROCAVITY DISCHARGE DEVICE AND METHOD 审中-公开
    随着对排放的微腔AC电压激励装置及方法

    公开(公告)号：EP1849180A2

    公开(公告)日：2007-10-31

    申请号：EP06849677.7

    申请日：2006-01-24

    申请人： THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS

    发明人： EDEN, J. Gary ,  CHEN, Kuo-Feng ,  OSTROM, Nels, P. ,  PARK, Sung-Jin

    IPC分类号： H01J61/04

    CPC分类号： H01J61/09 ,  H01J1/025 ,  H01J9/02 ,  H01J17/066 ,  H01J37/32018 ,  H01J37/32596 ,  H01J65/046

    摘要： A method for fabricating microcavity discharge devices and arrays of devices. The devices are fabricated by layering a dielectric (1020, 220) on a first conducting layer or substrate (210, 1010). A second conducting layer or structure is overlaid on the dielectric layer. In some devices, a microcavity (1040, 212) is created that penetrates the second conducting layer or structure and the dielectric layer. In other devices, the microcavity penetrates to the first conducting layer. The second conducting layer or structure together with the inside face of the microcavity is overlaid with a second dielectric layer. The microcavities are then filled with a discharge gas. When a time- varying potential of the appropriate magnitude is applied between the conductors, a microplasma discharge is generated in the microcavity. These devices can exhibit extended lifetimes since the conductors are encapsulated, shielding the conductors from degradation due to exposure to the plasma. Some of the devices are flexible and the dielectric can be chosen to act as a mirror.

    MICRODISCHARGE DEVICES WITH ENCAPSULATED ELECTRODES AND METHOD OF MAKING
    5.
    发明公开
    MICRODISCHARGE DEVICES WITH ENCAPSULATED ELECTRODES AND METHOD OF MAKING 有权
    MIKROENTLADEGERÄTE与包括电极及其制造方法

    公开(公告)号：EP1797579A2

    公开(公告)日：2007-06-20

    申请号：EP05858440.0

    申请日：2005-10-04

    申请人： THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS

    发明人： EDEN, J. Gary ,  PARK, Sung-Jin

    IPC分类号： H01J61/04 ,  H01J17/04

    CPC分类号： H01J17/04 ,  H01J9/02

    摘要： An embodiment of the invention is a microdischarge device including a first electrode (230) encapsulated in a dielectric, which may be a nanoporous dielectric film. A second electrode (240) is provided which may also be encapsulated with a dielectric. The electrodes are configured to ignite a discharge in a microcavity when a time-varying (an AC, RF, bipolar or a pulsed DC, etc.) potential is applied between the electrodes. In specific embodiments of the invention, the second electrode may be a screen covering the microcavity opening and the microcavity may be closed at one end. In some embodiments of the invention, the second electrode may be in direct contact with the first electrode. In other embodiments, a gap separates the electrodes. In a preferred method of manufacturing microdischarge devices with encapsulated electrodes, a metal substrate is used to form a nanoporous dielectric encapsulated electrode and dissolve a portion of the dielectric layer. The dielectric layer is then anodized a second time, resulting in a nanoporous dielectric encapsulated electrode with improved regularity of the nanoscale dielectric structures. In some embodiments of the invention, the columnar voids in the dielectric may be backfilled with one or more materials to further tailor the properties of the dielectric.