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公开(公告)号:EP4392174A1
公开(公告)日:2024-07-03
申请号:EP22859643.3
申请日:2022-08-24
IPC分类号: B01J3/06 , C03B25/02 , C03B33/04 , H01L29/66 , G01R33/32 , G01N33/50 , G01N33/90 , C03B29/04 , B82Y15/00 , G01N21/64 , G01N24/10 , H01L29/16
CPC分类号: B82Y15/00 , G01N24/10 , G01N33/90 , G01N21/6489 , G01R33/323 , G01N24/088 , G01R33/26