公开(公告)号：EP3062134A1

公开(公告)日：2016-08-31

申请号：EP14856282.0

申请日：2014-10-16

申请人： Tokai University Educational System ,  Nissan Chemical Industries, Ltd.

发明人： MIKAMI, Osamu ,  OHMORI, Kentaro ,  NAWATA, Hideyuki

IPC分类号： G02B6/138 ,  C09D183/04 ,  G02B1/11 ,  G02B6/12 ,  G02B6/122 ,  G03F7/11 ,  G03F7/20 ,  H01L21/027

CPC分类号： G03F7/091 ,  B29D11/00663 ,  C08F290/148 ,  C08G77/20 ,  C08G77/80 ,  C09D183/04 ,  G02B1/111 ,  G02B6/1221 ,  G02B6/138 ,  G03F7/0005 ,  G03F7/0755 ,  G03F7/16 ,  G03F7/20 ,  G03F7/32 ,  C08K5/0025

摘要： There is a method for producing an optical waveguide composing an optical path conversion component having an extremely low signal loss, allowing a high surface packaging density and high speed operation, and allowing high productivity. A method for producing an optical waveguide that propagates light from a surface of a support to an oblique direction not vertical to the surface, the method for producing an optical waveguide comprising the steps of: (1) providing an anti-reflective coating on the support; (2) placing a photosensitive resin composition on the anti-reflective coating, and exposing the photosensitive resin composition to a light ray entering from a direction non-vertical to the surface of the support through a photomask for curing the composition; and (3) removing the unexposed photosensitive resin composition by development; and an optical waveguide obtained by the method.

摘要翻译： 具有构成具有极低信号损失的光路转换部件的光波导的制造方法，能够实现高的表面封装密度和高速运转，能够实现高生产率。 一种用于制造将光从支撑体的表面传播到不垂直于表面的倾斜方向的光波导的方法，所述光波导的制造方法包括以下步骤：（1）在支撑体上设置抗反射涂层 ; （2）将光敏树脂组合物放置在抗反射涂层上，并将感光性树脂组合物通过用于固化组合物的光掩模从不垂直于载体表面的方向进入的光线曝光; 和（3）通过显影除去未曝光的感光性树脂组合物; 以及通过该方法获得的光波导。