公开(公告)号：EP2012345A1

公开(公告)日：2009-01-07

申请号：EP07708131.3

申请日：2007-02-07

申请人： Toyo Tanso Co., Ltd.

发明人： HIRAIWA, Jiro ,  YOSHIMOTO, Osamu ,  HAYAKAWA, Hiroshi ,  TOJO, Tetsuro ,  OKABE, Tsuneyuki ,  ASANO, Takanobu ,  WADA, Shinichi ,  NAKAO, Ken ,  KATO, Hitoshi

IPC分类号： H01L21/02 ,  B01J4/00 ,  C25B1/24 ,  C25B15/00 ,  F17D1/02

CPC分类号： F17D1/04 ,  C01B7/19 ,  F17C2250/032 ,  F17C2270/0518 ,  H01L21/67017 ,  H01L21/67276

摘要： Fluorine gas generators are connected with semiconductor manufacturing apparatuses 3a to 3e through a gas supplying system 2 including a storage tank 12 that can store a predetermined quantity of fluorine gas generated in the on-site fluorine gas generators 1a to 1e. When one or more of the on-site fluorine gas generators 1a to 1e are stopped, fluorine gas is supplied to the semiconductor manufacturing apparatuses 3a to 3e from the storage tank 12 storing a predetermined quantity of fluorine gas, so as to keep the operations of the semiconductor manufacturing apparatuses 3a to 3e. Thereby obtained is a semiconductor manufacturing plant in which fluorine gas generated in the fluorine gas generators can be safely and stably supplied to the semiconductor manufacturing apparatuses, and the cost performance is superior.

摘要翻译： 氟气发生器通过包括存储在现场氟气发生器1a至1e中产生的预定量的氟气的储罐12的气体供应系统2与半导体制造装置3a至3e连接。 当一个或多个现场氟气发生器1a至1e停止时，从存储预定量氟气的储罐12向半导体制造装置3a至3e供应氟气，以保持操作 半导体制造装置3a〜3e。 由此，能够将在氟气发生器中产生的氟气安全稳定地供给到半导体制造装置的半导体制造厂，成本表现优异。