公开(公告)号：EP1932949A1

公开(公告)日：2008-06-18

申请号：EP06767483.8

申请日：2006-06-28

申请人： TOYO TANSO CO., LTD.

发明人： TANAKA, Noriyuki ,  YOSHIMOTO, Osamu ,  HIRAIWA, Jiro ,  HAYAKAWA, Hiroshi ,  TOJO, Tetsuro

IPC分类号： C25B9/00 ,  C25B1/24 ,  C25B15/08

CPC分类号： C25B1/245 ,  C25B15/02 ,  C25B15/08

摘要： A fluorine/fluoride gas generator which has an electrolyte made of mixed molten salt containing hydrogen fluoride in an electrolytic cell including an anode chamber and a cathode chamber, and generates a gas containing fluorine by electrolyzing the electrolyte, includes a raw material supply pipe for supplying an electrolysis raw material, reaching the inside of the electrolyte in the electrolytic cell, a normally-closed valve provided in the middle of the raw material supply pipe, and a bypass pipe provided with a normally-open valve, joining the raw material supply pipe on the downstream side from the normally-closed valve to a gas phase area of the electrolytic cell. Accordingly, the electrolyte is prevented from being suctioned into the raw material supply pipe in the fluorine/fluoride gas generator, and solidification of the electrolyte inside the rawmaterial supply pipe can be prevented.

摘要翻译： 一种氟/氟化物气体发生器，其具有由包含阳极室和阴极室的电解池中含有氟化氢的混合熔融盐形成的电解质，并且通过电解电解产生含氟气体的氟/氟化物气体发生器包括：供给原料供给管 电解原料，到达电解池中的电解质的内部，设置在原料供给管的中间的常闭阀，以及设有常开阀的旁通管，将原料供给管 在常闭阀的下游侧到电解池的气相区域。 因此，防止电解液被吸入到氟/氟化物气体发生器中的原料供给管中，并且可以防止原料供给管内的电解质的凝固。

公开(公告)号：EP2012345A1

公开(公告)日：2009-01-07

申请号：EP07708131.3

申请日：2007-02-07

申请人： Toyo Tanso Co., Ltd.

发明人： HIRAIWA, Jiro ,  YOSHIMOTO, Osamu ,  HAYAKAWA, Hiroshi ,  TOJO, Tetsuro ,  OKABE, Tsuneyuki ,  ASANO, Takanobu ,  WADA, Shinichi ,  NAKAO, Ken ,  KATO, Hitoshi

IPC分类号： H01L21/02 ,  B01J4/00 ,  C25B1/24 ,  C25B15/00 ,  F17D1/02

CPC分类号： F17D1/04 ,  C01B7/19 ,  F17C2250/032 ,  F17C2270/0518 ,  H01L21/67017 ,  H01L21/67276

摘要： Fluorine gas generators are connected with semiconductor manufacturing apparatuses 3a to 3e through a gas supplying system 2 including a storage tank 12 that can store a predetermined quantity of fluorine gas generated in the on-site fluorine gas generators 1a to 1e. When one or more of the on-site fluorine gas generators 1a to 1e are stopped, fluorine gas is supplied to the semiconductor manufacturing apparatuses 3a to 3e from the storage tank 12 storing a predetermined quantity of fluorine gas, so as to keep the operations of the semiconductor manufacturing apparatuses 3a to 3e. Thereby obtained is a semiconductor manufacturing plant in which fluorine gas generated in the fluorine gas generators can be safely and stably supplied to the semiconductor manufacturing apparatuses, and the cost performance is superior.

摘要翻译： 氟气发生器通过包括存储在现场氟气发生器1a至1e中产生的预定量的氟气的储罐12的气体供应系统2与半导体制造装置3a至3e连接。 当一个或多个现场氟气发生器1a至1e停止时，从存储预定量氟气的储罐12向半导体制造装置3a至3e供应氟气，以保持操作 半导体制造装置3a〜3e。 由此，能够将在氟气发生器中产生的氟气安全稳定地供给到半导体制造装置的半导体制造厂，成本表现优异。