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公开(公告)号:EP3186616A4
公开(公告)日:2018-02-28
申请号:EP15836361
申请日:2015-08-28
CPC分类号: G03H1/0443 , G01N21/4788 , G01N23/20 , G01N23/2055 , G01N2021/95676 , G01N2223/33 , G01N2223/345 , G01N2223/611 , G01N2223/6116 , G01T1/00 , G02B21/0016 , G02B27/4205 , G03F1/84 , G03F7/70625 , G03H1/0465 , G03H1/16 , G03H2001/005 , G03H2001/0445 , G03H2001/045 , G03H2001/0456 , G21K7/00 , G21K2207/005
摘要: Apparatus and methods for coherent diffractive imaging with arbitrary angle of illumination incidence utilize a method of fast remapping of a detected diffraction intensity pattern from a detector pixel array (initial grid) to a uniform spatial frequency grid (final grid) chosen to allow for FFT on the remapped pattern. This is accomplished by remapping the initial grid to an intermediate grid chosen to result in a final grid that is linear in spatial frequency. The initial grid is remapped (generally by interpolation) to the intermediate grid that is calculated to correspond to the final grid. In general, the initial grid (x,y) is uniform in space, the intermediate grid ({tilde over (x)},{tilde over (y)}) is non-uniform in spatial frequency, and the final grid ({tilde over (f)}x,{tilde over (f)}y) is uniform in spatial frequency.