专利检索 ap:("UNIVERSITE PAUL CEZANNE AIX-MARSEILLE III") AND inv:"PALAIS, Olivier" 第 1 页

1.

发明公开
SOURCE LUMINEUSE ÉTENDUE ET ÉLECTRIQUEMENT MODULABLE, DISPOSITIF DE MESURE POUR CARACTÉRISER UN SEMI-CONDUCTEUR COMPORTANT UNE TELLE SOURCE 有权
标题翻译：电气模块化扩展光源和测量器具，用于表征此类源具有半导体

公开(公告)号：EP1982202A1

公开(公告)日：2008-10-22

申请号：EP07704273.7

申请日：2007-01-31

申请人： UNIVERSITE PAUL CEZANNE AIX-MARSEILLE III

发明人： PALAIS, Olivier , PASQUINELLI, Marcel

IPC分类号： G01R31/265 , G01R31/28

CPC分类号： G01R31/311

摘要： The invention relates to a light source for injecting excess carriers into a semiconductor wafer, fully illuminating a surface of the wafer (4). According to the invention, the source (1) includes at least one set of point sources (2) which are spaced apart at regular intervals along the X and Y axes, such that the source emits a monochromatic beam of a size that is at least equal to that of the semiconductor wafer surface to be illuminated. Each of the point sources (2) is sinusoidally modulated by a common electrical modulator (3), the distance (d) between two point sources and the distance (D) between the source (1) and the semiconductor wafer surface (4) to be illuminated being selected such that the monochromatic light beam uniformly illuminates said surface.