公开(公告)号：EP3392663A1

公开(公告)日：2018-10-24

申请号：EP16875011.5

申请日：2016-12-13

申请人： Universidade Federal De Minas Gerais - UFMG ,  Instituto Nacional de Metrologia Qualidade e Tecnologia - Inmetro

发明人： DE LOURENÇO E VASCONCELOS, Thiago ,  SANTOS DE OLIVEIRA, Bruno ,  ALBERTO ACHETE, Carlos ,  SOARES ARCHANJO, Bráulio ,  JORIO DE VASCONCELOS, Ado ,  DE OLIVEIRA LOPES CANÇADO, Luiz Gustavo ,  NUNES RODRIGUES, Wagner ,  ARANTES DA SILVA WETZSTEIN, Caroline ,  VALASKI, Rogerio ,  RABELO E SILVA, Cassiano

IPC分类号： G01Q70/16 ,  G01Q60/38 ,  G01R1/067

CPC分类号： G01Q60/22 ,  G01Q70/10 ,  G01R1/067

摘要： The present invention relates to a device for uses in scanning probe microscopy and to a method for manufacturing same. The metallic device comprises a single body (1) with two parts (2) and (3), wherein the second part (3) has a submicrometric point (4) that defines a nanoscale apex (7). The present invention also provides a method for manufacturing a high optical efficiency probe for scanning probe microscopy.