METHOD AND DEVICE FOR CONTROLLING A SCANNING PROBE MICROSCOPE
    2.
    发明公开
    METHOD AND DEVICE FOR CONTROLLING A SCANNING PROBE MICROSCOPE 审中-公开
    用于控制扫描探针显微镜的方法和装置

    公开(公告)号:EP2791688A1

    公开(公告)日:2014-10-22

    申请号:EP12812908.7

    申请日:2012-12-12

    IPC分类号: G01Q10/06 B82Y35/00

    摘要: The present invention relates to a method for controlling a scanning probe microscope having a probe (2) with a tip (21) for interacting with a sample (4), and a nanoscanner (1) for retaining the sample (4) or the probe (2), comprising the steps of monitoring the extension of the piezo element (1) along a first direction (R) along which the tip (21) is moved towards the sample (4), and adjusting the level of the probe (2) along the first direction (R) by means of an additional actuator (3), when the nanoscanner (1) exhibits an extension below or above a threshold value. The invention further relates to a device(100) for controlling a scanning probe microscope.

    摘要翻译: 本发明涉及一种用于控制扫描探针显微镜的方法,该扫描探针显微镜具有带有用于与样品(4)相互作用的尖端(21)的探针(2)以及用于保持样品(4)或探针(2)的纳米扫描器(1) (2)的步骤包括以下步骤:监测压电元件(1)沿着第一方向(R)的延伸,沿着第一方向(R),尖端(21)朝向样本(4)移动,并且调整探针(2 )在纳米扫描仪(1)展现低于或高于阈值的延伸时借助附加的致动器(3)沿第一方向(R)移动。 本发明还涉及一种用于控制扫描探针显微镜的装置(100)。

    METHOD AND DEVICE FOR CONTROLLING A SCANNING PROBE MICROSCOPE
    5.
    发明公开
    METHOD AND DEVICE FOR CONTROLLING A SCANNING PROBE MICROSCOPE 审中-公开
    用于控制扫描探针显微镜的方法和装置

    公开(公告)号:EP2932277A1

    公开(公告)日:2015-10-21

    申请号:EP13820748.5

    申请日:2013-12-12

    IPC分类号: G01Q10/06 B82Y35/00

    摘要: The present invention relates to a method for controlling a scanning probe microscope having a probe (2) with a tip (21) for interacting with a sample (4), and a nanoscanner (1) for retaining the sample (4) or the probe (2), comprising the steps of monitoring the extension of the piezo element (1)along a first direction (R) along which the tip (21) is moved towards the sample (4), and adjusting the level of the probe (2) along the first direction (R) by means of an additional actuator (3), when the nanoscanner (1) exhibits an extension below or above a threshold value. The invention further relates to a device (100) for controlling a scanning probe microscope.

    摘要翻译: 本发明涉及一种用于控制扫描探针显微镜的方法,该扫描探针显微镜具有带有用于与样品(4)相互作用的尖端(21)的探针(2)以及用于保持样品(4)或探针(2)的纳米扫描器(1) (2)的步骤包括以下步骤:监测压电元件(1)沿着第一方向(R)的延伸,沿着第一方向(R),尖端(21)朝向样本(4)移动,并且调整探针(2 )在纳米扫描仪(1)展现低于或高于阈值的延伸时借助附加的致动器(3)沿第一方向(R)移动。 本发明还涉及一种用于控制扫描探针显微镜的装置(100)。