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    A SCANNING PROBE MICROSCOPE HAVING AUTOMATIC PROBE EXCHANGE AND ALIGNMENT
    1.
    发明授权
    A SCANNING PROBE MICROSCOPE HAVING AUTOMATIC PROBE EXCHANGE AND ALIGNMENT 失效
    具有自动变化和方向探头网格探针显微镜

    公开(公告)号：EP0847590B1

    公开(公告)日：2009-11-18

    申请号：EP96931396.4

    申请日：1996-08-23

    申请人： Veeco Instruments Inc.

    发明人： YOUNG, James, M. ,  PRATER, Craig, B. ,  GRIGG, David, A. ,  MEYER, Charles, R. ,  HERTZOG, William, H. ,  GURLEY, John, A. ,  ELINGS, Virgil, B.

    IPC分类号： H01J37/22 ,  G01B7/34 ,  G01N27/00

    CPC分类号： G01Q70/02 ,  G01Q30/06 ,  Y10S977/85

    摘要： A scanning probe microscope and method having automated exchange and precise alignment of probe, wherein one or more additional stored probes (4) for installation onto a probe mount (32) are stored in a storage cassette (22) or a wafer, a selected probe is aligned to a detection system (11), and the aligned probe is then clamped against the probe mount. Clamping is performed using a clamp (68) which is disabled when removing a replacement probe from the storage cassette, enabled when installing the probe on the probe mount and disabled when releasing the probe at a later time for subsequent probe exchange. Probe alignment is automated using signal from the probe detection system or by determining probe positioning using pattern recognition processing of the probe image to allow probe removal and exchange without operator intervention. Techniques for error checking are employed to ensure proper probe installation and operation.

    METHOD AND APPARATUS FOR OBTAINING IMPROVED VERTICAL METROLOGY MEASUREMENTS
    2.
    发明公开
    METHOD AND APPARATUS FOR OBTAINING IMPROVED VERTICAL METROLOGY MEASUREMENTS 审中-公开
    方法和设备得到改良垂直测

    公开(公告)号：EP1025416A1

    公开(公告)日：2000-08-09

    申请号：EP98951955.8

    申请日：1998-09-23

    申请人： VEECO INSTRUMENTS INC.

    发明人： BABCOCK, Kenneth, L. ,  ELINGS, Virgil, B. ,  GURLEY, John, A. ,  KJOLLER, Kevin

    IPC分类号： G01B5/28

    CPC分类号： G01Q10/06 ,  G01B7/34 ,  G01Q30/04 ,  Y10S977/852

    摘要： A probe-based surface characterization or metrology instrument accounts for errors in the vertical positioning of its probe and errors in detecting the vertical position of its probe. These errors are accounted for by subtracting reference scan data from measurement scan data. The measurement scan data is obtained from an area that includes the feature of interest as well as a portion of a reference area that includes the feature of interest, as well as a portion of the reference area which is featureless. The reference scan data is obtained from an area that includes the reference area and that, preferably, excludes the features of interest. This procedure is particularly well-suited for measuring pole tip recession in a magnetic head.