公开(公告)号：EP2577722A1

公开(公告)日：2013-04-10

申请号：EP11727070.2

申请日：2011-06-07

Applicant: Veeco Instruments Inc.

Inventor： LUSE, Todd, Arthur ,  PARANJPE, Ajit, Pramod ,  CELARU, Adrian ,  SCANDARIATO, Joseph ,  TANG, Quinfu

IPC: H01L21/687

CPC classification number: H01L21/68771 ,  C23C16/4584 ,  H01L21/68764

Abstract: Wafer carriers and methods for moving wafers in a reactor. The wafer carrier (220) may include a platen (215) with a plurality of compartments and a plurality of wafer platforms (210). The platen (215) is configured to rotate about a first axis. Each of the wafer platforms (210) is associated with one of the compartments and is configured to rotate about a respective second axis relative to the respective compartment (770). The platen (215) and the wafer platforms (210) rotate with different angular velocities to create planetary motion therebetween. The method may include rotating a platen (215) about a first axis of rotation. The method further includes rotating each of a plurality of wafer platforms (210) carried on the platen (215) and carrying the wafers (200) about a respective second axis of rotation and with a different angular velocity than the platen (215) to create planetary motion therebetween.

公开(公告)号：EP2471065A1

公开(公告)日：2012-07-04

申请号：EP10814294.4

申请日：2010-08-26

Applicant: Veeco Instruments Inc.

Inventor： PARANJPE, Ajit ,  LUSE, Todd, Arthur ,  FREMGEN, Roger, P. ,  SRINIVASAN, Narasimhan ,  ROOK, Katrina ,  DRUZ, Boris, L. ,  CELARU, Adrian

IPC: G11B5/65

CPC classification number: G11B5/855 ,  C23C14/042 ,  C23C14/046 ,  C23C14/505 ,  H01L21/67173 ,  H01L21/67709 ,  H01L21/67712 ,  H01L21/67718 ,  H01L21/67742 ,  H01L21/67754

Abstract: An inline processing system for patterning magnetic recording layers on hard discs for use in a hard disc drive. Discs are processed on both sides simultaneously in a vertical orientation, in round plate-like holders called MDCs. A plurality (as many as 10) discs are held in a dial carrier of the MDC, and transferred from one process station to another. The dial carrier of the MDC may be rotated and/or angled at up to 70° from normal in each process station, so that one or a plurality of process sources may treat the discs simultaneously. This configuration provides time savings and a reduction in the number and size of process sources needed. A mask enhancement process for patterning of magnetic media, and a filling and planarizing process used therewith, are also disclosed.