公开(公告)号：EP1743381A4

公开(公告)日：2008-04-16

申请号：EP05724461

申请日：2005-03-04

申请人： WISCONSIN ALUMNI RES FOUND

发明人： SCHEIBLE DOMINIK V ,  BLICK ROBERT H

IPC分类号： H01L29/76 ,  H01L49/00 ,  H03H9/02 ,  H03H9/24

CPC分类号： H01L49/00 ,  B82Y10/00 ,  H01L29/7613 ,  H03H9/02259 ,  H03H9/2405 ,  H03H2009/02267 ,  H03H2009/02314 ,  H03H2009/02496

摘要： An electron transfer device is implemented in a structure which is readily capable of achieving charge transfer cycle frequencies in the range of several hundred MHz or more and which can be formed by conventional semiconductor integrated circuit manufacturing processes. The device includes a substrate having a horizontal extent and a pillar on the substrate extending from the substrate vertically with respect to the horizontal extent of the substrate. The pillar is formed to vibrate laterally with respect to the vertical length of the pillar at a resonant frequency which can be several hundred MHz. Drain and source electrodes extend from the substrate vertically with respect to the horizontal extent of the substrate, and have innermost ends on opposite sides of the pillar. The pillar is free to vibrate laterally back and forth between the innermost ends of the drain and source electrodes to transfer charge between the electrodes.