公开(公告)号：EP0878020B1

公开(公告)日：2001-10-31

申请号：EP97908130.4

申请日：1997-01-31

申请人： Wu, Jeng-Ming

发明人： Wu, Jeng-Ming

IPC分类号： H01J37/32

CPC分类号： H01J37/3222 ,  H01J37/32192 ,  H01J37/32247 ,  H01J37/32266

摘要： The invention concerns an electromagnetic high-frequency or microwave apparatus comprising a treatment chamber (6) with a transfer wall (7, 7', 7') which allows electromagnetic waves to pass through to an adjacent chamber (4) and is designed to influence the intensity distribution of the transfer of the electromagnetic waves into the treatment chamber (6). The apparatus according to the invention enables the intensity of the transferred waves to be controlled with low losses in that the transfer wall (7, 7', 7') comprises a plurality of rod-shaped antenna elements (10, 10') oriented at an angle to the plane of the wall of the adjacent chamber (4), the antenna elements (10, 10') projecting centrally through through-openings (14, 14') delimited by electrically conductive material.

公开(公告)号：EP1421832A1

公开(公告)日：2004-05-26

申请号：EP02762243.0

申请日：2002-08-20

申请人： Wu, Jeng-Ming

发明人： Wu, Jeng-Ming

IPC分类号： H05H1/30

CPC分类号： H05H1/30 ,  H05H1/50

摘要： The invention relates to a plasma burner with microwave stimulation, by means of which a stable plasma (5) can be generated even with significant pressure variations for the process gas. Said plasma burner comprises, in addition to a diameter enlargement (4) of the cavity (3) in the region of the plasma (5) as already disclosed in DE 19 511 915 A1, electrically-conducting windings (12), coaxially encompassing the plasma (5) within the cavity formed by the diameter enlargement. Said windings (12) permit the electrical waveguide system, formed by the diametrically-enlarged cavity (4) and windings (12) as coaxial outer guide and the plasma as coaxial inner guide, to be suitable for the transmission of microwaves in said region of the plasma burner with regard to the parameters of impedance and transmission bandwidth in a particular manner, even with significant pressure variations in the process gas and corresponding variable conductance conditions. Said plasma burner is characterised in operation by a stable plasma (5) and very good ignition and re-ignition properties.

公开(公告)号：EP1421832B1

公开(公告)日：2006-10-04

申请号：EP02762243.0

申请日：2002-08-20

申请人： Wu, Jeng-Ming

发明人： Wu, Jeng-Ming

IPC分类号： H05H1/30

CPC分类号： H05H1/30 ,  H05H1/50

摘要： The invention relates to a plasma burner with microwave stimulation, by means of which a stable plasma (5) can be generated even with significant pressure variations for the process gas. Said plasma burner comprises, in addition to a diameter enlargement (4) of the cavity (3) in the region of the plasma (5) as already disclosed in DE 19 511 915 A1, electrically-conducting windings (12), coaxially encompassing the plasma (5) within the cavity formed by the diameter enlargement. Said windings (12) permit the electrical waveguide system, formed by the diametrically-enlarged cavity (4) and windings (12) as coaxial outer guide and the plasma as coaxial inner guide, to be suitable for the transmission of microwaves in said region of the plasma burner with regard to the parameters of impedance and transmission bandwidth in a particular manner, even with significant pressure variations in the process gas and corresponding variable conductance conditions. Said plasma burner is characterised in operation by a stable plasma (5) and very good ignition and re-ignition properties.

公开(公告)号：EP0878020A1

公开(公告)日：1998-11-18

申请号：EP97908130.0

申请日：1997-01-31

申请人： Wu, Jeng-Ming

发明人： Wu, Jeng-Ming

IPC分类号： H05H1 ,  H01J37 ,  H01L21

CPC分类号： H01J37/3222 ,  H01J37/32192 ,  H01J37/32247 ,  H01J37/32266

摘要： The invention concerns an electromagnetic high-frequency or microwave apparatus comprising a treatment chamber (6) with a transfer wall (7, 7', 7') which allows electromagnetic waves to pass through to an adjacent chamber (4) and is designed to influence the intensity distribution of the transfer of the electromagnetic waves into the treatment chamber (6). The apparatus according to the invention enables the intensity of the transferred waves to be controlled with low losses in that the transfer wall (7, 7', 7') comprises a plurality of rod-shaped antenna elements (10, 10') oriented at an angle to the plane of the wall of the adjacent chamber (4), the antenna elements (10, 10') projecting centrally through through-openings (14, 14') delimited by electrically conductive material.