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    PLASMA MICROWAVE CAVITY
    1.
    发明公开
    PLASMA MICROWAVE CAVITY 有权
    PLASMAMIKROWELLENHOHLRAUM

    公开(公告)号：EP2725603A1

    公开(公告)日：2014-04-30

    申请号：EP12801846.2

    申请日：2012-03-13

    申请人： Yangtze Optical Fibre and Cable Joint Stock Limited Company

    发明人： ZHANG, Jinyan ,  WANG, Ruichun ,  XIA, Xianhui

    IPC分类号： H01J37/32 ,  C23C16/513

    CPC分类号： H01J37/32247 ,  C03B37/0183 ,  C23C16/511 ,  H01J37/32192 ,  H01J37/32229 ,  Y02P40/57

    摘要： A plasma microwave cavity used for a plasma chemical vapor deposition (PCVD) apparatus comprises a cavity housing (5) and a waveguide device (10) connected with the cavity housing (5). Two ends of the cavity housing (5) are provided with coaxial through holes along the axial direction of the cavity. A glass neck bush (7) is arranged through the through holes at the two ends, and runs through a cavity body and the through holes at the two ends. The glass neck bush (7) comprises a glass straight cylinder (1) and glass check rings (2) arranged at the two ends of the glass straight cylinder (1). One or two ends of the glass straight cylinder (1) are provided with external threads (3). The glass check rings (2) are connected with the ends of the glass straight cylinder (1) by screw holes formed on the glass check rings. The plasma microwave cavity is convenient to mount and adjust, avoids the use of high-temperature combustion of hydrogen and oxygen to effectively avoid metallic elements of the cavity from being dispersed due to high temperature, thereby ensuring the stable performance and quality of manufactured optical fiber performs, improving the operational performance stability of the plasma microwave cavity, and prolonging the effective service life of the plasma microwave cavity.

    摘要翻译： 用于等离子体化学气相沉积（PCVD）装置的等离子体微波腔包括空腔壳体（5）和与空腔壳体（5）连接的波导装置（10）。 空腔壳体（5）的两端沿腔体的轴向设有同轴的通孔。 玻璃颈套（7）穿过两端的通孔布置，穿过一个空腔体和两端的通孔。 玻璃颈套（7）包括玻璃直筒（1）和布置在玻璃直筒（2）的两端的玻璃止挡环（2）。 玻璃直筒（1）的一端或两端设有外螺纹（3）。 玻璃检查环（2）通过玻璃检查环上形成的螺孔与玻璃直筒（1）的端部连接。 等离子微波空腔安装调试方便，避免使用高温氧气和氧气，有效避免空腔金属元件由于高温而分散，从而保证制造光纤的性能和质量稳定 提高等离子微波空腔的运行性能稳定性，延长等离子微波空腔的有效使用寿命。