公开(公告)号：EP1429380A4

公开(公告)日：2009-07-15

申请号：EP02760759

申请日：2002-08-28

申请人： ZEON CORP ,  OHMI TADAHIRO

发明人： OHMI TADAHIRO ,  JIMBO T ,  MURAKAMI T

IPC分类号： H01L21/00 ,  H01L21/673

CPC分类号： H01L21/67303 ,  H01L21/67306 ,  H01L21/67313 ,  H01L21/67316 ,  H01L21/6732 ,  H01L21/67323 ,  H01L21/67326 ,  H01L21/6733 ,  H01L21/67353 ,  H01L21/67359 ,  H01L21/67386 ,  Y10T428/13 ,  Y10T428/1303 ,  Y10T428/1352 ,  Y10T428/1359 ,  Y10T428/1386 ,  Y10T428/139

摘要： A container for a precision substrate, which has at least one component formed from a thermoplastic resin, characterized in that it satisfies the following characteristics [1] and [2]: [1] when a flow of an ultra-high pure argon gas impurity content: 1 ppb or less is continuously contacted with the container with a flow rate of 1.2 L/min, the argon gas has a moisture content of 30 ppb per 1 cm2 of the surface area of the component 30 min after the start of contacting [2] when the container is placed in air at 100ringC, the amount of the organic materials in the air which is increased in the period of 300 min. is 150 ng or less per 1 g of the weight of the component. The container can satisfy the requirement of low staining for a container for a precision substrate.