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    INTERFEROMETRIC APPARATUS AND METHOD THAT COMPENSATE REFRACTIVE INDEX FLUCTUATIONS
    3.
    发明公开
    INTERFEROMETRIC APPARATUS AND METHOD THAT COMPENSATE REFRACTIVE INDEX FLUCTUATIONS 审中-公开
    干涉测量设备和方法FLUKTRATIONSKOMPENSATION折射率

    公开(公告)号：EP1194731A4

    公开(公告)日：2006-09-27

    申请号：EP00913773

    申请日：2000-03-07

    申请人： ZYGO CORP

    发明人： DE GROOT PETER J

    IPC分类号： G01B9/02 ,  G01B11/00 ,  G03F1/08 ,  G03F7/20 ,  G03F9/00 ,  H01L21/027 ,  G01B11/02 ,  G01N21/41 ,  G01N21/43

    CPC分类号： G03F7/70775 ,  G01B9/0207 ,  G01B2290/60 ,  G03F7/70883

    摘要： Methods and apparatus that combine dispersion interferometry with refractometry to compensate for refractive index fluctuations in the measurement path (20, 22) of a dispersion interferometer (44) over both short and long time periods. Dispersion and refractometry data (16) are weighted over appropriate time intervals, and means and methods are also provided for initializing Η, the inverse dispersive power, so that the dispersion and refractometry data (16) are self consistent. A refractometer (26) is placed in close proximity to the measurement path (20, 22) of the dispersion interferometer (44) to experience substantially the same air flow and act as a surrogate for obtaining information about the index of refraction.

    MEASURING TOPOGRAPHY OF ASPHERIC AND OTHER NON-FLAT SURFACES
    4.
    发明公开
    MEASURING TOPOGRAPHY OF ASPHERIC AND OTHER NON-FLAT SURFACES 有权
    MESSUNG DER TOPOGRAFIE VON ASPHERISCHEN UND ANDEREN NICHT-FLACHENFLÄCHEN

    公开(公告)号：EP3092459A4

    公开(公告)日：2016-11-30

    申请号：EP15735227

    申请日：2015-01-08

    申请人： ZYGO CORP

    发明人： DRESEL THOMAS ,  LIESENER JAN ,  DE GROOT PETER J

    IPC分类号： G01B11/24 ,  G01B9/02 ,  G01B11/00 ,  G01B11/04 ,  G01B11/25 ,  G01M11/02

    CPC分类号： G02B21/367 ,  G01B9/02072 ,  G01B9/02085 ,  G01B9/04 ,  G01B11/2441 ,  G01B11/2522 ,  G01B2210/52 ,  G01M11/025 ,  G01M11/0271 ,  G02B21/002 ,  G02B21/008 ,  G02B21/26

    摘要： Generating a composite image of a non-flat surface includes: acquiring, using a microscope, multiple images of different areas of the non-flat surface, where each image includes a region of overlap with at least one adjacent image, the microscope having sufficient resolution to image in three dimensions a microstructure on the non-flat surface having a lateral dimension of 10 microns or less and a height of 10 nm or less; determining, for each of the images, a set of rigid body parameters relating a position and orientation of the test object in the image to a common coordinate system, where the set of rigid body parameters is determined by fitting the resolved microstructure in the overlap region in the image with the corresponding microstructure in the overlap region of the adjacent image; and combining the images based on the sets of rigid body parameters to generate a composite image.

    摘要翻译： 生成非平坦表面的合成图像包括：使用显微镜获取非平坦表面的不同区域的多个图像，其中每个图像包括与至少一个相邻图像重叠的区域，显微镜具有足够的分辨率 在三维上成像具有10微米或更小的横向尺寸和10纳米或更小的高度的非平坦表面上的微结构; 对于每个图像，确定将图像中的测试对象的位置和取向与公共坐标系相关联的一组刚体参数，其中通过将分辨的微结构拟合在重叠区域中来确定刚体参数的集合 在相邻图像的重叠区域中具有相应微结构的图像中; 并且基于刚体参数的集合来组合图像以生成合成图像。

    INTERFEROMETERS UTILIZING POLARIZATION PRESERVING OPTICAL SYSTEMS
    5.
    发明公开
    INTERFEROMETERS UTILIZING POLARIZATION PRESERVING OPTICAL SYSTEMS 审中-公开
    与光学系统干涉POLARISATIONKONSERVIERENDEN

    公开(公告)号：EP1208349A4

    公开(公告)日：2006-10-04

    申请号：EP00950626

    申请日：2000-07-25

    申请人： ZYGO CORP

    发明人： HILL HENRY ALLEN ,  DE GROOT PETER J

    IPC分类号： G01B9/02 ,  G02B5/30 ,  G03F1/08 ,  G03F7/20 ,  H01L21/027

    CPC分类号： G01B9/02059 ,  G01B9/02003 ,  G01B9/02018 ,  G01B2290/15 ,  G01B2290/70

    摘要： Interferometers (510) utilizing polarization-preserving optical systems (511, 512) by plane polarized beams are deviated through preselected angles without changing their linear state of polarization. The interferometers (510) utilizing such optical systems have a variety of applications and are particularly suitable for use in the field of distance measuring interferometry to enhance measurement accuracy by reducing undesirable polarization effects that can introduce errors associated with an otherwise present undesirable polarization rotation found in classical retroreflectors. Prismatic optical elements are preferably used to construct assemblies (511, 512) which can include polarization beam splitting coating arrangements and/or birefringent materials to enhance the extinction ratio between orthogonally polarized beams propagating through such systems.

    INTERFEROMETER HAVING REDUCED GHOST BEAM EFFECTS
    8.
    发明公开
    INTERFEROMETER HAVING REDUCED GHOST BEAM EFFECTS 有权
    具有减少BEAM寄生虫影响干涉

    公开(公告)号：EP1208350A4

    公开(公告)日：2002-10-30

    申请号：EP00950627

    申请日：2000-07-25

    申请人： ZYGO CORP

    发明人： DE GROOT PETER J

    IPC分类号： G01B9/02 ,  G01J3/447 ,  G01J3/45

    CPC分类号： G01B9/02059 ,  G01B9/02003 ,  G01B9/02018 ,  G01B2290/70

    摘要： Polarization interferometric architectures (10), preferably plane mirror types, having first and second measurement legs are provided with retardation elements (18, 20, 24), preferably, at least one set of split waveplates (18, 20), comprised of two segments (18, 20), tilted slightly (e.g., 2 mrad) in opposite directions with respect to each other to reduce the effects of undesirable ghost beams that otherwise would travel along the same path as the principal beams (14, 45) to produce significant cyclic errors. With the use of the split waveplates (18, 20), double reflection ghost beams have net tilts relative to the principal measurement beam, and therefore do not contribute to interference effects. This effectively eliminates waveplate ghost reflections as a source of error. Use of the such split, tilted waveplates (18, 20) may be made in a variety of polarization interferometers including, but not limited to, uncompensated plane mirror, high stability plane mirror, differential plane mirror, double differential plane mirror, and dual linear/angular types.