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公开(公告)号:EP3379204A1
公开(公告)日:2018-09-26
申请号:EP17162320.0
申请日:2017-03-22
申请人: ams International AG
IPC分类号: G01D5/24
CPC分类号: G01D5/24
摘要: An arrangement (2) to calibrate a capacitive sensor interface (1) comprises a capacitive sensor (10) having a capacitance (cmem, cmemsp, cmemsm) and a charge storing circuit (20) having a changeable capacitance (cdum, cdump, cdumm). A test circuit (30) applies a test signal (vtst) to the capacitive sensor (10) and the charge storing circuit (20). An amplifier circuit (40) has a first input connection (E40a) coupled to the capacitive sensor (10) and a second input connection (E40b) coupled to the charge storing circuit (20). The amplifier circuit (40) provides an output signal (Vout) in dependence on a first input signal (ΔVerr1) applied to the first input connection (E40a) and a second input signal (ΔVerr2) applied to the second input connection (E40b). A control circuit (60) is configured to trim the capacitance (cdum, cdump, cdumm) of the charge storing circuit (20) such that the level of the output signal (Vout) tends to the level of zero.
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公开(公告)号:EP3376778B8
公开(公告)日:2020-08-12
申请号:EP17160562.9
申请日:2017-03-13
申请人: ams International AG
发明人: Niederberger, Mark
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公开(公告)号:EP3376778A1
公开(公告)日:2018-09-19
申请号:EP17160562.9
申请日:2017-03-13
申请人: ams International AG
发明人: Niederberger, Mark
摘要: The microphone comprises a housing (1, 2), which has an inner volume (12) filled with a gas, an opening (10) of the housing, an acoustic sensor (3) arranged in the housing, a diaphragm (13) of the acoustic sensor located above the opening, and a heater (14) in the inner volume. The acoustic sensor may especially comprise a microelectromechanical system. The gas is heated from inside the inner volume to increase the pressure and generate a corresponding signal of the acoustic sensor (3). This signal can be used for self-calibration of the sensitivity or for self-diagnostics to check the function of the microphone.
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公开(公告)号:EP3376778B1
公开(公告)日:2020-06-24
申请号:EP17160562.9
申请日:2017-03-13
申请人: ams International AG
发明人: Niederberger, Mark
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公开(公告)号:EP3331160A1
公开(公告)日:2018-06-06
申请号:EP16201746.1
申请日:2016-12-01
申请人: ams International AG
发明人: Fröhlich, Thomas , Niederberger, Mark , Steele, Colin , Blattmann, Rene , Christen, Thomas , Perktold, Lukas , Pham, Duy-Dong
CPC分类号: H03F1/26 , H03F1/34 , H03F3/181 , H03F3/45475 , H03F3/45941 , H03F3/70 , H03F2200/03 , H03F2200/129 , H03F2200/261 , H03F2200/42 , H03F2203/45066 , H03F2203/45511 , H03F2203/45512 , H03F2203/45521
摘要: A MEMS sensor (1) comprises a MEMS transducer (10) being coupled to a MEMS interface circuit (20). The MEMS interface circuit (20) comprises a bias voltage generator (100), a differential amplifier (200), a capacitor (300) and a feedback control circuit (400). The bias voltage generator (100) generates a bias voltage (Vbias) for operating the MEMS transducer. The variable capacitor (300) is connected to one of the input nodes (1200a) of the differential amplifier (200). At least one of the output nodes (A200a, A200b) of the differential amplifier is coupled to a base terminal (T110) of an output filter (110) of the bias voltage generator (100). Any disturbing signal from the bias voltage generator (100) is a common-mode signal that is divided equally on the input nodes (1200a, 1200b) of the differential amplifier (200) and is therefore rejected.
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