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公开(公告)号:EP3912197A1
公开(公告)日:2021-11-24
申请号:EP20700410.2
申请日:2020-01-16
申请人: trinamiX GmbH
发明人: HERMES, Wilfried , VALOUCH, Sebastian , MUELLER, Sebastian , HOEH, Regina , BECHTEL, Heidi , ALTENBECK, Timo , DITTMANN, Fabian , FEUERSTEIN, Bertram , HUPFAUER, Thomas , HANDRECK, Anke , GUST, Robert , SEND, Robert , BRUDER, Ingmar
IPC分类号: H01L31/09 , H01L31/0203 , H01L31/032
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公开(公告)号:EP3931880A1
公开(公告)日:2022-01-05
申请号:EP20706281.1
申请日:2020-02-26
申请人: trinamiX GmbH
发明人: HERMES, Wilfried , VALOUCH, Sebastian , MUELLER, Sebastian , HOEH, Regina , BECHTEL, Heidi , ALTENBECK, Timo , DITTMANN, Fabian , FEUERSTEIN, Bertram , HUPFAUER, Thomas , HANDRECK, Anke , GUST, Robert , KALETTA, Peter Paul , KAELBLEIN, Daniel , SEND, Robert
IPC分类号: H01L31/09 , H01L31/02 , H01L31/0203 , H01L31/0224 , H01L31/032
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公开(公告)号:EP3612805A1
公开(公告)日:2020-02-26
申请号:EP18719826.2
申请日:2018-04-19
申请人: trinamiX GmbH
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4.
公开(公告)号:EP3939092A1
公开(公告)日:2022-01-19
申请号:EP20710934.9
申请日:2020-03-13
申请人: trinamiX GmbH
发明人: HERMES, Wilfried , VALOUCH, Sebastian , MUELLER, Sebastian , HOEH, Regina , BECHTEL, Heidi , ALTENBECK, Timo , DITTMANN, Fabian , FEUERSTEIN, Bertram , HUPFAUER, Thomas , HANDRECK, Anke , GUST, Robert , KALETTA, Peter Paul , SEND, Robert , WAINDOK, Hubert , HENNIG, Ingolf , GURIYANOVA, Svetlana
IPC分类号: H01L31/09 , H01L31/032 , H01L31/0216 , H01L21/66
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