摘要:
A method of burning exhaust gases containing gaseous silane in which the exhaust gases containing gaseous silane to be introduced into a combustion chamber are diluted with an inert gas so that the concentration of silane gas is reduced to less than 30% by volume and the diluted exhaust gases are fed from a nozzle to the combustion chamber and burnt through reaction with airs in the combustion chamber while the region between the head of the nozzle top end and the base portion of the burning flame is shielded with an inert gas atmosphere. An inert gas mixing pipe 17 is connected for dilution to an exhaust gas feed section 16, an enclosure pipe 21 is fitted to the outer circumference of an exhaust gas introduction pipe 13 introduced into the combustion chamber 6 to constitute a double pipe structure, and the enclosure pipe 21 is connected at the rear end thereof to an inert gas feed pipe 25 and slightly protruded at the top end thereof ahead of the top end of the exhaust gas introduction pipe.
摘要:
A method of burning exhaust gases containing gaseous silane in which the exhaust gases containing gaseous silane to be introduced into a combustion chamber are diluted with an inert gas so that the concentration of silane gas is reduced to less than 30% by volume and the diluted exhaust gases are fed from a nozzle to the combustion chamber and burnt through reaction with airs in the combustion chamber while the region between the head of the nozzle top end and the base portion of the burning flame is shielded with an inert gas atmosphere. An inert gas mixing pipe 17 is connected for dilution to an exhaust gas feed section 16, an enclosure pipe 21 is fitted to the outer circumference of an exhaust gas introduction pipe 13 introduced into the combustion chamber 6 to constitute a double pipe structure, and the enclosure pipe 21 is connected at the rear end thereof to an inert gas feed pipe 25 and slightly protruded at the top end thereof ahead of the top end of the exhaust gas introduction pipe.
摘要:
A method for synthesizing carbon nanocoils with high efficiency, by determining the structure of carbon nuclei that have been attached to the ends of carbon nanocoils and thus specifying a true catalyst for synthesizing carbon nanocoils is implemented. The catalyst for synthesizing carbon nanocoils according to the present invention is a carbide catalyst that contains at least elements (a transition metal element, In, C) or (a transition metal element, Sn, C), and in particular, it is preferable for the transition metal element to be Fe, Co or Ni. In addition to this carbide catalyst, a metal catalyst of (Fe, Al, Sn) and (Fe, Cr, Sn) are effective. From among these, catalysts such as Fe 3 InC 0.5 , Fe 3 InC 0.5 Snw and Fe 3 SnC are particularly preferable. The wire diameter and the coil diameter can be controlled by using a catalyst where any of these catalysts is carried by a porous carrier.
摘要:
A method for the combustion of specific exhaust gases such as silane-containing exhaust gases discharged from a reaction furnace in which a combustible gas is supplied to and burnt around the top end of a nozzle for the exhaust gases, thereby forming a flame barrier around the top end of the nozzle, and the exhaust gases are introduced from the top end of the nozzle to the inside of the flame barrier to be compulsorily burnt by the flame ahead of the barrier of the flame atmosphere.
摘要:
A method for the combustion of specific exhaust gases such as silane-containing exhaust gases discharged from a reaction furnace in which a combustible gas is supplied to and burnt around the top end of a nozzle for the exhaust gases, thereby forming a flame barrier around the top end of the nozzle, and the exhaust gases are introduced from the top end of the nozzle to the inside of the flame barrier to be compulsorily burnt by the flame ahead of the barrier of the flame atmosphere.