公开(公告)号：EP2359388A1

公开(公告)日：2011-08-24

申请号：EP09756295.3

申请日：2009-11-13

申请人： DIACCON GmbH ,  CemeCon AG

发明人： RÜFFER, Martin ,  ROSIWAL, Stefan ,  BAREISS, Christian ,  REICHERT, Walter ,  LEMMER, Oliver ,  PERLE, Marc

IPC分类号： H01L21/00 ,  C23C16/27

CPC分类号： C23C16/278 ,  C23C16/24 ,  C23C16/271 ,  C23C16/272 ,  C23C16/273 ,  H01L21/67098 ,  H01L21/67115

摘要： The invention relates to a device for coating a substrate (14) using CVD, in particular for coating with diamond or silicon, wherein a heat conductor array comprising a plurality of elongated heat conductors (2) is provided in a housing (10), said heat conductors extending between a first (1) and a second electrode (8), wherein the heat conductors (2) are held individually tensioned by a tensioning device attached to one end thereof. For the purposes of improving the life of the heat conductors (2), the invention proposes that the tensioning device comprises a tilt arm (5) having a tensioning weight (G), the heat conductor (2) being attached to the first end (E1) of said tilt arm, and the second end thereof substantially being mounted pivotably about a horizontal axis (H).

公开(公告)号：EP2359388B1

公开(公告)日：2013-07-31

申请号：EP09756295.3

申请日：2009-11-13

申请人： DIACCON GmbH ,  CemeCon AG

发明人： RÜFFER, Martin ,  ROSIWAL, Stefan ,  BAREISS, Christian ,  REICHERT, Walter ,  LEMMER, Oliver ,  PERLE, Marc

IPC分类号： C23C16/24 ,  H01L21/67 ,  C23C16/27

CPC分类号： C23C16/278 ,  C23C16/24 ,  C23C16/271 ,  C23C16/272 ,  C23C16/273 ,  H01L21/67098 ,  H01L21/67115