COMBINED SURFACE INSPECTION USING MULTIPLE SCANNERS
    5.
    发明公开
    COMBINED SURFACE INSPECTION USING MULTIPLE SCANNERS 审中-公开
    使用多台扫描仪进行组合表面检查

    公开(公告)号:EP3321667A1

    公开(公告)日:2018-05-16

    申请号:EP17191926.9

    申请日:2017-09-19

    Abstract: Provided are methods and systems for inspecting surfaces of various components, such as evaluating height deviations on these surfaces. A method involves aggregating inspection data from multiple line scanners into a combined data set. This combined data set represents a portion of the surface that is larger than the field of measurement any one of the scanners. Furthermore, each pair of adjacent scanners operate at different periods of time to avoid interference. Because operating periods are offset, surface portions scanned by the pair of adjacent scanners can overlap without interference. This overlap of the scanned portions ensures that the entire surface is analyzed. The position of scanners relative to the inspection surface may be changed in between the scans and, in some embodiments, even during the scan. This approach allows precise scanning of large surfaces.

    Abstract translation: 提供了用于检查各种部件的表面的方法和系统,诸如评估这些表面上的高度偏差。 一种方法涉及将来自多行扫描仪的检查数据汇总成组合数据集。 该组合数据集表示比任何一个扫描仪的测量场大的表面的一部分。 此外,每对相邻的扫描仪在不同的时间段运行以避免干扰。 由于操作周期是偏移的,所以这对相邻扫描仪扫描的表面部分可以重叠而没有干扰。 扫描部分的这种重叠确保分析整个表面。 扫描仪相对于检查表面的位置可以在扫描之间以及在一些实施例中甚至在扫描期间改变。 这种方法可以精确扫描大型表面。

    GAS DETECTION DEVICE
    7.
    发明授权
    GAS DETECTION DEVICE 有权
    气体检测装置

    公开(公告)号:EP2988114B1

    公开(公告)日:2018-02-28

    申请号:EP14784955.8

    申请日:2014-04-08

    Abstract: A gas detector (10) includes a cell internal space (130) into which a target gas is supplied, the target gas exhibiting an absorption peak in an absorption spectrum; a light source (410) configured to generate light having at least a wavelength belonging to the absorption peak; and a photodetector (420) configured to detect the light that has emitted from the light source (410) and has propagated through the cell internal space (130). The gas detector (10) further includes a conductive thin film (220) in which a plurality of optical apertures(222) are regularly arranged such that a transmission peak in a transmission spectrum is superimposed over the absorption peak in the absorption spectrum along a wavelength axis. The conductive thin film (220) is provided on an optical path extending from the light source (410) to the photodetector (420), and is provided so as to be contactable with the target gas within the cell internal space (130).

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