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    Surface analysis method and apparatus
    1.
    发明公开
    Surface analysis method and apparatus 失效
    表面分析方法和装置

    公开(公告)号：EP0377446A2

    公开(公告)日：1990-07-11

    申请号：EP90100051.3

    申请日：1990-01-02

    申请人： HITACHI, LTD.

    发明人： Ninomiya, Ken ,  Suzuki, Keizo

    IPC分类号： G01N23/227 ,  G06F19/00

    CPC分类号： G01N21/63 ,  G01N21/1702 ,  G01N23/22 ,  G01N2021/178 ,  G01N2201/1035 ,  G01N2223/10 ,  G01N2223/33 ,  G01N2223/345

    摘要： A method of and an apparatus for analyzing a surface are disclosed, in which the intensity profile of a probe beam at the surface of a sample (2 ) is measured, the intensity distribution of a detection signal along the surface of the sample is measured by scanning the surface of the sample with the probe beam, and mathematical transformation is carried out for each of the measured intensity profile and the measured signal-intensity distribution, to make surface analysis with high resolution.

    摘要翻译： 公开了一种用于分析表面的方法和设备，其中测量样品（2）表面处的探测光束的强度分布，通过测量沿样品表面的检测信号的强度分布 用探针光束扫描样品的表面，并对测量的强度分布和测量的信号强度分布中的每一个进行数学变换，以高分辨率进行表面分析。

    METHOD FOR ACQUIRING SIMULTANEOUS AND OVERLAPPING OPTICAL AND CHARGED PARTICLE BEAM IMAGES
    2.
    发明公开
    METHOD FOR ACQUIRING SIMULTANEOUS AND OVERLAPPING OPTICAL AND CHARGED PARTICLE BEAM IMAGES 审中-公开
    AND METHOD FOR法同时录制影像重叠光学和带电粒子束

    公开(公告)号：EP2601477A2

    公开(公告)日：2013-06-12

    申请号：EP11815181.0

    申请日：2011-08-02

    申请人： Omniprobe, Inc.

    发明人： MOORE, Thomas ,  HARTFIELD, Cheryl ,  MAGEL, Gregory

    IPC分类号： G01B11/00 ,  G01B9/04 ,  H01J37/26

    CPC分类号： H01J37/28 ,  G01N23/2251 ,  G01N2223/10 ,  G01N2223/418 ,  G02B21/002 ,  G02B21/367 ,  H01J37/228 ,  H01J2237/2445

    摘要： This disclosure relates to a method and apparatus for producing multiple pixel-by-pixel simultaneous and overlapping images of a sample in a microscope with multiple imaging beams. A scanning electron microscope, a focused ion-beam microscope, or a microscope having both beams, also has an optical microscope. A region of interest on a sample is scanned by both charged-particle and optical beams, either by moving the sample beneath the beams by use of a mechanical stage, or by synchronized scanning of the stationary sample by the imaging beams, or by independently scanning the sample with the imaging beams and recording imaging signals so as to form pixel-by-pixel simultaneous and overlapping images.

    摘要翻译： 本公开涉及一种用于在具有多个成像射束显微镜产生样品的多个像素由像素同时和重叠的图像的方法和装置。 扫描型电子显微镜，聚焦离子束显微镜，或具有两种光束显微镜，以便有光学显微镜。 感兴趣样品上的区域由两个带电粒子和光束扫描，或者通过使用机械台的移动梁下方的样品，或由成像射束固定样品的同步扫描，或者通过unabhängig扫描 与成像光束和记录的摄像信号的样品，以形成像素的逐像素同时和重叠的图像。