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    METHOD FOR ACQUIRING SIMULTANEOUS AND OVERLAPPING OPTICAL AND CHARGED PARTICLE BEAM IMAGES
    3.
    发明公开
    METHOD FOR ACQUIRING SIMULTANEOUS AND OVERLAPPING OPTICAL AND CHARGED PARTICLE BEAM IMAGES 审中-公开
    AND METHOD FOR法同时录制影像重叠光学和带电粒子束

    公开(公告)号：EP2601477A2

    公开(公告)日：2013-06-12

    申请号：EP11815181.0

    申请日：2011-08-02

    申请人： Omniprobe, Inc.

    发明人： MOORE, Thomas ,  HARTFIELD, Cheryl ,  MAGEL, Gregory

    IPC分类号： G01B11/00 ,  G01B9/04 ,  H01J37/26

    CPC分类号： H01J37/28 ,  G01N23/2251 ,  G01N2223/10 ,  G01N2223/418 ,  G02B21/002 ,  G02B21/367 ,  H01J37/228 ,  H01J2237/2445

    摘要： This disclosure relates to a method and apparatus for producing multiple pixel-by-pixel simultaneous and overlapping images of a sample in a microscope with multiple imaging beams. A scanning electron microscope, a focused ion-beam microscope, or a microscope having both beams, also has an optical microscope. A region of interest on a sample is scanned by both charged-particle and optical beams, either by moving the sample beneath the beams by use of a mechanical stage, or by synchronized scanning of the stationary sample by the imaging beams, or by independently scanning the sample with the imaging beams and recording imaging signals so as to form pixel-by-pixel simultaneous and overlapping images.

    摘要翻译： 本公开涉及一种用于在具有多个成像射束显微镜产生样品的多个像素由像素同时和重叠的图像的方法和装置。 扫描型电子显微镜，聚焦离子束显微镜，或具有两种光束显微镜，以便有光学显微镜。 感兴趣样品上的区域由两个带电粒子和光束扫描，或者通过使用机械台的移动梁下方的样品，或由成像射束固定样品的同步扫描，或者通过unabhängig扫描 与成像光束和记录的摄像信号的样品，以形成像素的逐像素同时和重叠的图像。

    METHOD FOR SAMPLE SEPARATION AND LIFT-OUT
    5.
    发明公开
    METHOD FOR SAMPLE SEPARATION AND LIFT-OUT 有权
    程序样品和分离PROBENAUSHEBUNG

    公开(公告)号：EP1436601A1

    公开(公告)日：2004-07-14

    申请号：EP01945982.5

    申请日：2001-05-23

    申请人： Omniprobe, Inc.

    发明人： MOORE, Thomas, M. ,  KRUGER, Rocky, D. ,  HARTFIELD, Cheryl

    IPC分类号： G01N21/86

    CPC分类号： G01N1/286 ,  H01J37/3056 ,  H01J37/31 ,  H01J2237/31745 ,  H01L21/67092

    摘要： When a desired portion (110) is separated from an integrated circuit chip or a semiconductor wafer (100), the portion is separated so that the resulting sample can be moved to a location for examination by TEM, SEM or other means. A sample portion of the chip or wafer containing an area of interest is separated with a single cut by a focused ion-beam (160). Prior to separation, the sample is fixed to a micromanipulator probe (120). The sample is moved by the probe to the location for examination and fixed there. The probe is then detached form the sample by the focused ion-beam.

    METHOD FOR EXTRACTING FROZEN SPECIMENS AND MANUFACTURE OF SPECIMEN ASSEMBLIES
    6.
    发明公开
    METHOD FOR EXTRACTING FROZEN SPECIMENS AND MANUFACTURE OF SPECIMEN ASSEMBLIES 审中-公开
    提取冷冻样品的方法和样本安排生产

    公开(公告)号：EP2694941A2

    公开(公告)日：2014-02-12

    申请号：EP12768369.6

    申请日：2012-04-04

    申请人： Omniprobe, Inc.

    发明人： HARTFIELD, Cheryl

    IPC分类号： G01N1/28 ,  G02B21/34 ,  H01J37/20

    CPC分类号： F25D3/107 ,  G01N1/42 ,  H01J37/20 ,  H01J2237/2002 ,  H01J2237/208 ,  H01J2237/31745

    摘要： A method for attaching a frozen specimen to a manipulator probe tip typically inside a charged-particle beam microscope. The method comprises cooling the probe tip to a temperature at or below that of the frozen specimen, where the temperature of the frozen specimen is preferably at or below the vitrification temperature of water; bringing the probe tip into contact with the frozen specimen, and bonding the probe tip to the frozen specimen by flowing water vapor onto the region of contact between the probe tip and the frozen specimen. The bonded probe tip and specimen may be moved to a support structure such as a TEM grid and bonded to it by similar means. The probe tip can then be disconnected by heating the probe tip or applying a charged-particle beam.